The fabrication, characterization and testing of a MEMS circular diaphragm mass sensor

• Main Authors: Ismail, A. K., Burdess, J. S., Harris, A. J., Suarez, G., Keegan, N., Spoors, J. A., Chang, S. C., McNeil, C. J., Hedley, J.
• Format: Article
• Published: Institute of Physics Publishing 2008
• Subjects: QC Physics
• Online Access: http://eprints.utm.my/id/eprint/12780/; http://dx.doi.org/10.1088/0960-1317/18/2/025021

This paper presents a discussion on the fabrication, characterization and testing of a degenerate mode resonant mass sensor which takes the form of a crystalline silicon MEMS circular diaphragm. The device is fabricated from the device layer of a SOI wafer which is bonded anodically to a Pyrex subst...