Design and analysis of the silicon-based integrated metal-insulator-metal capacitor

• Main Author: Rosli, Nurul Asyikin
• Format: Thesis
• Language: English
• Published: 2022
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.utm.my/id/eprint/102691/1/NurulAsyikinRosliMSKE2022.pdf.pdf; http://eprints.utm.my/id/eprint/102691/; http://dms.library.utm.my:8080/vital/access/manager/Repository/vital:149763

At present, the high possible of miniaturization of a component has become an urgent necessity, particularly in silicon-based integrated circuit design. One of the keys to enhance the integrated circuits by constructing a Metal-Insulator-Metal (MIM) capacitors in the silicon-based of electronic appl...