Micropatterning of non-crystalline methylsilsesquioxane–titania hybrid films based on their structural changes with UV irradiation

• Main Authors: Ainuddin, Ainun Rahmahwati, Hakiri, Norio, Muto, Hiroyuki, Matsuda, Atsunori
• Format: Article
• Language: English
• Published: Wiley 2012
• Subjects: QC Physics; TJ Mechanical engineering and machinery
• Online Access: http://eprints.uthm.edu.my/4920/1/AJ%202017%20%28243%29%20Micropatterning%20of%20non-crystalline.pdf; http://eprints.uthm.edu.my/4920/; http://dx.doi.org/10.1002/pssa.201228139

Non-crystalline, transparent methylsilsesquioxane–titania hybrid films for application in micropatterning were prepared from methyltriethoxysilane and titanium tetrabutoxide by the sol–gel method. The hybrid films were heat-treated at 100 8C for 1 h and then irradiated with UV light using an ultrahigh...