Aluminum Oxide Support Layer for Vertical Growth of Single Walled Carbon Nanotube using Alcohol Catalytic CVD Technique

• Main Authors: Asyadi Azam, Mohd, Fujiwara, Akihiko, Shimoda, Tatsuya
• Format: Conference or Workshop Item
• Language: English
• Published: 2011
• Subjects: Q Science (General); TA Engineering (General). Civil engineering (General)
• Online Access: http://eprints.utem.edu.my/id/eprint/4670/1/AMN-5_Abstract_Mohd_Asyadi_Azam.pdf; http://eprints.utem.edu.my/id/eprint/4670/

We report our research work on different type of Al oxide support layer in order to produce VA-SWCNTs. The electron beam (EB) deposition was mainly used to deposit high purity Al and Al2O3 thin film (20 nm). For the as-deposited Al metal layer, several oxidation treatments were elucidated to confirm...