Novel Thick-Film Piezoceramic Micro-Generator Based on Free-Standing Structures
Thick-film piezoelectric free-standing structures fabricated with a combination of conventional thick-film technology and a sacrificial layer technique are presented. The structures were fabricated in the form of composite cantilevers, consisting of lead zirconate titanate (PZT) as the functional el...
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| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2008
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| Subjects: | |
| Online Access: | http://eprints.utem.edu.my/id/eprint/4378/1/p64.pdf http://eprints.utem.edu.my/id/eprint/4378/ http://ieeexplore.ieee.org/xpls/abs_all.jsp?tp=&arnumber=4684416 |
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