Free-Standing Pb(Zr, Ti)O3 Thick-Films Prepared By a One-Step Air Co-Firing Technique

• Main Authors: Kok, Swee Leong, White, Neil, Nick, Harris
• Format: Conference or Workshop Item
• Language: English
• Published: 2008
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.utem.edu.my/id/eprint/4374/1/Manuscript.pdf; http://eprints.utem.edu.my/id/eprint/4374/; http://www.mendeley.com/research/freestanding-pbzr-tio3-thickfilms-prepared-by-a-onestep-air-cofiring-technique/

Combinations of conventional thick-film technology and sacrificial layer techniques were used to fabricate free-standing structures, in the form of cantilever beams. By taking advantage of the different thermal expansion coefficients between silver/palladium (Ag/Pd) and piezoceramic Pb(Zr, Ti)O3, it...