Silterra cleaning solution in post chemical mechanical polishing oxide to minimize ammoniacal nitrogen in effluent

• Main Author: Said, Muhammad Asyraf
• Format: Thesis
• Language: English; English
• Published: 2023
• Subjects: T Technology (General); TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.utem.edu.my/id/eprint/28300/1/Silterra%20cleaning%20solution%20in%20post%20chemical%20mechanical%20polishing%20oxide%20to%20minimize%20ammoniacal%20nitrogen%20in%20effluent.pdf; http://eprints.utem.edu.my/id/eprint/28300/2/Silterra%20cleaning%20solution%20in%20post%20chemical%20mechanical%20polishing%20oxide%20to%20minimize%20ammoniacal%20nitrogen%20in%20effluent.pdf; http://eprints.utem.edu.my/id/eprint/28300/; https://plh.utem.edu.my/cgi-bin/koha/opac-detail.pl?biblionumber=123812

Malaysia’s Department of Environment (DOE) has introduced ammoniacal nitrogen as a new parameter to be regulated under the Environment Quality (Industrial Effluents) Act effective from 1st January 2010. The penalty for not complying to any provision of the Environmental Quality Act (EQA) is a fine n...