Formation And Evaluation Of Silicon Substrate With Highly-Doped Porous Si Layers Formed By Metal-Assisted Chemical Etching

Porous silicon (Si) is a low thermal conductivity material, which has high potential for thermoelectric devices. However, low output performance of porous Si hinders the development of thermoelectric performance due to low electrical conductivity. The large contact resistance from nonlinear contact...

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Bibliographic Details
Main Authors: Ono, Takahito, Li, Yi Jie, Wang, Zhuqing, Toan, Nguyen Van, Samat, Khairul Fadzli
Format: Article
Language:English
Published: Springer 2021
Online Access:http://eprints.utem.edu.my/id/eprint/25635/2/2021_1%20Q1%20ARTICLE_FORMATIONANDEVALUATIONOFSILICO.PDF
http://eprints.utem.edu.my/id/eprint/25635/
https://nanoscalereslett.springeropen.com/track/pdf/10.1186/s11671-021-03524-z.pdf
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