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Deposition And Characterisation Of Solution Processed Indium Gallium Zinc Oxide Thin Film On Silicon Substrate

This research was conducted with an objective to deposit optimum polycrystalline indium gallium zinc oxide (IGZO) on silicon (Si) substrate by using solution processed method. Specifically, sol-gel method was selected to prepare IGZO precursor solution and spin coating method was used to deposit the...

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Main Author: Kasim, Nabihah
Format: Thesis
Language:English
Published: 2022
Subjects:
TK Electrical Engineering. Electronics. Nuclear Engineering
Online Access:http://eprints.usm.my/59671/1/Pages%20from%20NABIHAH%20BINTI%20KASIM%20-%20TESIS%20cut.pdf
http://eprints.usm.my/59671/
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spelling my.usm.eprints.59671 http://eprints.usm.my/59671/ Deposition And Characterisation Of Solution Processed Indium Gallium Zinc Oxide Thin Film On Silicon Substrate Kasim, Nabihah TK Electrical Engineering. Electronics. Nuclear Engineering This research was conducted with an objective to deposit optimum polycrystalline indium gallium zinc oxide (IGZO) on silicon (Si) substrate by using solution processed method. Specifically, sol-gel method was selected to prepare IGZO precursor solution and spin coating method was used to deposit the film. 2022-09 Thesis NonPeerReviewed application/pdf en http://eprints.usm.my/59671/1/Pages%20from%20NABIHAH%20BINTI%20KASIM%20-%20TESIS%20cut.pdf Kasim, Nabihah (2022) Deposition And Characterisation Of Solution Processed Indium Gallium Zinc Oxide Thin Film On Silicon Substrate. PhD thesis, Universiti Sains Malaysia.
institution Universiti Sains Malaysia
building Hamzah Sendut Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Sains Malaysia
content_source USM Institutional Repository
url_provider http://eprints.usm.my/
language English
topic TK Electrical Engineering. Electronics. Nuclear Engineering
spellingShingle TK Electrical Engineering. Electronics. Nuclear Engineering
Kasim, Nabihah
Deposition And Characterisation Of Solution Processed Indium Gallium Zinc Oxide Thin Film On Silicon Substrate
description This research was conducted with an objective to deposit optimum polycrystalline indium gallium zinc oxide (IGZO) on silicon (Si) substrate by using solution processed method. Specifically, sol-gel method was selected to prepare IGZO precursor solution and spin coating method was used to deposit the film.
format Thesis
author Kasim, Nabihah
author_facet Kasim, Nabihah
author_sort Kasim, Nabihah
title Deposition And Characterisation Of Solution Processed Indium Gallium Zinc Oxide Thin Film On Silicon Substrate
title_short Deposition And Characterisation Of Solution Processed Indium Gallium Zinc Oxide Thin Film On Silicon Substrate
title_full Deposition And Characterisation Of Solution Processed Indium Gallium Zinc Oxide Thin Film On Silicon Substrate
title_fullStr Deposition And Characterisation Of Solution Processed Indium Gallium Zinc Oxide Thin Film On Silicon Substrate
title_full_unstemmed Deposition And Characterisation Of Solution Processed Indium Gallium Zinc Oxide Thin Film On Silicon Substrate
title_sort deposition and characterisation of solution processed indium gallium zinc oxide thin film on silicon substrate
publishDate 2022
url http://eprints.usm.my/59671/1/Pages%20from%20NABIHAH%20BINTI%20KASIM%20-%20TESIS%20cut.pdf
http://eprints.usm.my/59671/
_version_ 1787133082406486016
score 13.209306

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