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Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021]

Dimensi didalam peranti mickro VLSI semakin berkurangan dengan satu objektif, iaitu untuk meningkatkan laju pengendalian. Device dimension in VLSI circuit constantly shrink with one main objective, i.e. increase in speed.

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Bibliographic Details
Main Author: Aw, Kean Chin
Format: Thesis
Language:English
Published: 2002
Subjects:
QC Physics
Online Access:http://eprints.usm.my/5568/1/Growth_and_Characterisation_of_Low-k_dielectric_Spin_on_Glass_%28PhD%29.pdf
http://eprints.usm.my/5568/
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spelling my.usm.eprints.5568 http://eprints.usm.my/5568/ Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021] Aw, Kean Chin QC Physics Dimensi didalam peranti mickro VLSI semakin berkurangan dengan satu objektif, iaitu untuk meningkatkan laju pengendalian. Device dimension in VLSI circuit constantly shrink with one main objective, i.e. increase in speed. 2002-11 Thesis NonPeerReviewed application/pdf en http://eprints.usm.my/5568/1/Growth_and_Characterisation_of_Low-k_dielectric_Spin_on_Glass_%28PhD%29.pdf Aw, Kean Chin (2002) Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021]. PhD thesis, Universiti Sains Malaysia.
institution Universiti Sains Malaysia
building Hamzah Sendut Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Sains Malaysia
content_source USM Institutional Repository
url_provider http://eprints.usm.my/
language English
topic QC Physics
spellingShingle QC Physics
Aw, Kean Chin
Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021]
description Dimensi didalam peranti mickro VLSI semakin berkurangan dengan satu objektif, iaitu untuk meningkatkan laju pengendalian. Device dimension in VLSI circuit constantly shrink with one main objective, i.e. increase in speed.
format Thesis
author Aw, Kean Chin
author_facet Aw, Kean Chin
author_sort Aw, Kean Chin
title Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021]
title_short Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021]
title_full Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021]
title_fullStr Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021]
title_full_unstemmed Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021]
title_sort growth and characterisation of low-k dielectric spin on glass [qc585. a963 2002 f rb] [microfiche 7021]
publishDate 2002
url http://eprints.usm.my/5568/1/Growth_and_Characterisation_of_Low-k_dielectric_Spin_on_Glass_%28PhD%29.pdf
http://eprints.usm.my/5568/
_version_ 1643700204498583552
score 13.211869

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