Design And Fabrication Of Spin Coating System For 8-Inch Wafer

• Main Author: Teoh, Chin Keng
• Format: Monograph
• Language: English
• Published: Universiti Sains Malaysia 2018
• Subjects: T Technology; TJ Mechanical engineering and machinery
• Online Access: http://eprints.usm.my/54170/1/Design%20And%20Fabrication%20Of%20Spin%20Coating%20System%20For%208-Inch%20Wafer_Teoh%20Chin%20Keng_M4_2018.pdf; http://eprints.usm.my/54170/

The size of the silicon wafer has been increased from 100 mm to 200 mm in diameter. The transition of the wafer into bigger size is due to overall cost benefits resulting from the larger number of dice per wafer. Growing in chip size and growing of demand also reasons the transition wafer into the...