Design And Fabrication Of A Projectionlithography Machine For The Application Of Microfluidic Pattern Using Commercially Available UV LED

• Main Author: Zulkifli, Zikri
• Format: Monograph
• Language: English
• Published: Universiti Sains Malaysia 2018
• Subjects: T Technology; TJ Mechanical engineering and machinery
• Online Access: http://eprints.usm.my/54166/1/Design%20And%20Fabrication%20Of%20A%20Projectionlithography%20Machine%20For%20The%20Application%20Of%20Microfluidic%20Pattern%20Using%20Commercially%20Available%20UV%20Led_Zikri%20Zulkifli_M4_2018.pdf; http://eprints.usm.my/54166/

In the present work, a 12µm PDMS microfluidic channel are developed using an in-house designed projection lithography machine system. A master pattern was first produce by patterning on microscope slide which is spin coated with SU-8 2002 negative photoresist and exposing it with the in-house proj...