Development Of Micro Heating Element By Optical Lithography On Alumina Substrate

• Main Author: Tan, Teong Sheng
• Format: Monograph
• Language: English
• Published: Universiti Sains Malaysia 2017
• Subjects: T Technology; TJ Mechanical engineering and machinery
• Online Access: http://eprints.usm.my/53556/1/Development%20Of%20Micro%20Heating%20Element%20By%20Optical%20Lithography%20On%20Alumina%20Substrate_Tan%20Teong%20Sheng_M4_2017.pdf; http://eprints.usm.my/53556/

Optical lithography has been used to deposit resist coatings with desired pattern on flat substrate typically silicon wafer. Yet, rather little attention has been given to the development of Fe-Cr-Al alloys on alumina substrate. Thus, a particular interest has been given to the study of Fe-Cr-Al...