Effects Of Dry Oxidation Treaments On The Characteristics Of Gallium Oxide Thin Films Prepared Using Sol-Gel Spin Coating Method
In this paper, gallium oxide (Ga2O3) thin films were grown on silicon (Si) substrate using a relatively simple and low-cost sol-gel spin coating method followed dry oxidation process. Two series of dry oxidation experiments were conducted, i.e., (i) annealing at different oxygen flow rates (i.e., fr...
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| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2020
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| Subjects: | |
| Online Access: | http://eprints.usm.my/48922/1/MNRG_NSS01.pdf http://eprints.usm.my/48922/ |
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