Fabrication and Characterization of Copper Doped Zinc Oxide on p-type and ntype Gallium Nitride by Sputtering
Zinc oxide (ZnO) is a wide band gap semiconductor (3.3 7ev) with promising appli cations in optoelectroni c devices and flat panel display. Copper (Cu) doping changes the properti es of ZnO. Pure and Cu doped ZnO (CZO) were deposited on p-type and 11-type ga llium nitride (GaN) using radio fi·equenc...
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my.usm.eprints.48797 http://eprints.usm.my/48797/ Fabrication and Characterization of Copper Doped Zinc Oxide on p-type and ntype Gallium Nitride by Sputtering Yusof, Ahmad Sauffi Hassan, Zainuriah Zainal, Norzaini QC1-999 Physics Zinc oxide (ZnO) is a wide band gap semiconductor (3.3 7ev) with promising appli cations in optoelectroni c devices and flat panel display. Copper (Cu) doping changes the properti es of ZnO. Pure and Cu doped ZnO (CZO) were deposited on p-type and 11-type ga llium nitride (GaN) using radio fi·equency (RF) magnetron sputtering of Cu!ZnO alloy target with ratio I 0/90 at room temperature. The effect of different deposition thickness of the thin film on the crysta l structure, surface morphology and surface roughnesswere investigated intensively using X-ray diffraction (XRD), field em ission scanning electron microscopy (FE-SEM), energy dispersive X-ray spectroscopy (EDX) andatomic force microscopy (AFM)respectively. Results indicate th at the films with hexago nal wurtzite structure and preferential c ax is orientation were fabricated. Crystalli zation of thin film is dependent on the deposition thickness. As the thickness of the film increases, the grain size increases and surface roughness decreases. 2016-12-07 Conference or Workshop Item PeerReviewed application/pdf en http://eprints.usm.my/48797/1/ZO5.pdf%20done.pdf Yusof, Ahmad Sauffi and Hassan, Zainuriah and Zainal, Norzaini (2016) Fabrication and Characterization of Copper Doped Zinc Oxide on p-type and ntype Gallium Nitride by Sputtering. In: 3rd Meeting of Malaysia Nitrides Research Group (MNRG 2016). |
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QC1-999 Physics Yusof, Ahmad Sauffi Hassan, Zainuriah Zainal, Norzaini Fabrication and Characterization of Copper Doped Zinc Oxide on p-type and ntype Gallium Nitride by Sputtering |
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Zinc oxide (ZnO) is a wide band gap semiconductor (3.3 7ev) with promising appli cations in optoelectroni c devices and flat panel display. Copper (Cu) doping changes the properti es of ZnO. Pure and Cu doped ZnO (CZO) were deposited on p-type and 11-type ga llium nitride (GaN) using radio fi·equency (RF) magnetron sputtering of Cu!ZnO alloy target with ratio I 0/90 at room temperature. The effect of different deposition thickness of the thin film on the crysta l structure, surface morphology and surface roughnesswere investigated intensively using X-ray diffraction (XRD), field em ission scanning electron microscopy (FE-SEM), energy dispersive X-ray spectroscopy (EDX) andatomic force microscopy (AFM)respectively. Results indicate th at the films with hexago nal wurtzite structure and preferential c ax is orientation were fabricated. Crystalli zation of thin film is dependent on the deposition thickness. As the thickness of the film increases, the grain size increases and surface roughness decreases. |
format |
Conference or Workshop Item |
author |
Yusof, Ahmad Sauffi Hassan, Zainuriah Zainal, Norzaini |
author_facet |
Yusof, Ahmad Sauffi Hassan, Zainuriah Zainal, Norzaini |
author_sort |
Yusof, Ahmad Sauffi |
title |
Fabrication and Characterization of Copper Doped Zinc Oxide on p-type and ntype Gallium Nitride by Sputtering |
title_short |
Fabrication and Characterization of Copper Doped Zinc Oxide on p-type and ntype Gallium Nitride by Sputtering |
title_full |
Fabrication and Characterization of Copper Doped Zinc Oxide on p-type and ntype Gallium Nitride by Sputtering |
title_fullStr |
Fabrication and Characterization of Copper Doped Zinc Oxide on p-type and ntype Gallium Nitride by Sputtering |
title_full_unstemmed |
Fabrication and Characterization of Copper Doped Zinc Oxide on p-type and ntype Gallium Nitride by Sputtering |
title_sort |
fabrication and characterization of copper doped zinc oxide on p-type and ntype gallium nitride by sputtering |
publishDate |
2016 |
url |
http://eprints.usm.my/48797/1/ZO5.pdf%20done.pdf http://eprints.usm.my/48797/ |
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1696977052041740288 |
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13.19449 |