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A Study On The Fabrication And Characterization Of Sputtered Cr Doped Zno Thin Film Gas Sensors

Zinc oxide (ZnO) and chromium (Cr) doped ZnO thin films were successfully produced by reactive radio frequency co-sputtering of high purity zinc and chromium metal targets. The Cr concentrations were in the range of (1 – 4) atomic percentage. The X – ray diffraction revealed that the ZnO films posse...

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Main Author: al-Hardan, Naif Hammad Misshin
Format: Thesis
Language:English
Published: 2011
Subjects:
QC1 Physics (General)
Online Access:http://eprints.usm.my/42130/1/NAIF_HAMMAD_MISSHIN_AL-HARDAN.pdf
http://eprints.usm.my/42130/
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spelling my.usm.eprints.42130 http://eprints.usm.my/42130/ A Study On The Fabrication And Characterization Of Sputtered Cr Doped Zno Thin Film Gas Sensors al-Hardan, Naif Hammad Misshin QC1 Physics (General) Zinc oxide (ZnO) and chromium (Cr) doped ZnO thin films were successfully produced by reactive radio frequency co-sputtering of high purity zinc and chromium metal targets. The Cr concentrations were in the range of (1 – 4) atomic percentage. The X – ray diffraction revealed that the ZnO films possessed a polycrystalline structure with a (002) dominant phase grown along the c-axis of the hexagonal structure of the ZnO. The (002) peak was slightly shifted toward higher Bragg angles when the Cr substitutionally replaced the Zn in the ZnO crystals. The films exhibited a uniformly distributed nano grains with a columnar structure. 2011-06 Thesis NonPeerReviewed application/pdf en http://eprints.usm.my/42130/1/NAIF_HAMMAD_MISSHIN_AL-HARDAN.pdf al-Hardan, Naif Hammad Misshin (2011) A Study On The Fabrication And Characterization Of Sputtered Cr Doped Zno Thin Film Gas Sensors. PhD thesis, Universiti Sains Malaysia.
institution Universiti Sains Malaysia
building Hamzah Sendut Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Sains Malaysia
content_source USM Institutional Repository
url_provider http://eprints.usm.my/
language English
topic QC1 Physics (General)
spellingShingle QC1 Physics (General)
al-Hardan, Naif Hammad Misshin
A Study On The Fabrication And Characterization Of Sputtered Cr Doped Zno Thin Film Gas Sensors
description Zinc oxide (ZnO) and chromium (Cr) doped ZnO thin films were successfully produced by reactive radio frequency co-sputtering of high purity zinc and chromium metal targets. The Cr concentrations were in the range of (1 – 4) atomic percentage. The X – ray diffraction revealed that the ZnO films possessed a polycrystalline structure with a (002) dominant phase grown along the c-axis of the hexagonal structure of the ZnO. The (002) peak was slightly shifted toward higher Bragg angles when the Cr substitutionally replaced the Zn in the ZnO crystals. The films exhibited a uniformly distributed nano grains with a columnar structure.
format Thesis
author al-Hardan, Naif Hammad Misshin
author_facet al-Hardan, Naif Hammad Misshin
author_sort al-Hardan, Naif Hammad Misshin
title A Study On The Fabrication And Characterization Of Sputtered Cr Doped Zno Thin Film Gas Sensors
title_short A Study On The Fabrication And Characterization Of Sputtered Cr Doped Zno Thin Film Gas Sensors
title_full A Study On The Fabrication And Characterization Of Sputtered Cr Doped Zno Thin Film Gas Sensors
title_fullStr A Study On The Fabrication And Characterization Of Sputtered Cr Doped Zno Thin Film Gas Sensors
title_full_unstemmed A Study On The Fabrication And Characterization Of Sputtered Cr Doped Zno Thin Film Gas Sensors
title_sort study on the fabrication and characterization of sputtered cr doped zno thin film gas sensors
publishDate 2011
url http://eprints.usm.my/42130/1/NAIF_HAMMAD_MISSHIN_AL-HARDAN.pdf
http://eprints.usm.my/42130/
_version_ 1643710417996873728
score 13.209306

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