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Structural and optical properties of ZnO thin films deposited using atomic layer deposition technique

ZnO films have been successfully deposited by Atomic Layer Deposition (ALD) using Diethylzinc (DEZn) and water (H2O) as precursors.

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Bibliographic Details
Main Author: PPKBSM, Pusat Pengajian Bahan & Sumber Mineral
Format: Conference or Workshop Item
Language:English
Published: 2011
Subjects:
TN1-997 Mining engineering. Metallurgy
Online Access:http://eprints.usm.my/25179/1/STRUCTURAL_AND_OPTICAL_PROPERTIES_OF_ZnO_THIN_FILMS_DEPOSITED_USING_ATOMIC_LAYER_DEPOSITION_TECHNIQUE.pdf
http://eprints.usm.my/25179/
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spelling my.usm.eprints.25179 http://eprints.usm.my/25179/ Structural and optical properties of ZnO thin films deposited using atomic layer deposition technique PPKBSM, Pusat Pengajian Bahan & Sumber Mineral TN1-997 Mining engineering. Metallurgy ZnO films have been successfully deposited by Atomic Layer Deposition (ALD) using Diethylzinc (DEZn) and water (H2O) as precursors. 2011-11 Conference or Workshop Item PeerReviewed application/pdf en http://eprints.usm.my/25179/1/STRUCTURAL_AND_OPTICAL_PROPERTIES_OF_ZnO_THIN_FILMS_DEPOSITED_USING_ATOMIC_LAYER_DEPOSITION_TECHNIQUE.pdf PPKBSM, Pusat Pengajian Bahan & Sumber Mineral (2011) Structural and optical properties of ZnO thin films deposited using atomic layer deposition technique. In: 3rd International Workshop on Nanotechnology & Application 2011, 10 – 12 November 2011, Vung Tau, Vietnam.
institution Universiti Sains Malaysia
building Hamzah Sendut Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Sains Malaysia
content_source USM Institutional Repository
url_provider http://eprints.usm.my/
language English
topic TN1-997 Mining engineering. Metallurgy
spellingShingle TN1-997 Mining engineering. Metallurgy
PPKBSM, Pusat Pengajian Bahan & Sumber Mineral
Structural and optical properties of ZnO thin films deposited using atomic layer deposition technique
description ZnO films have been successfully deposited by Atomic Layer Deposition (ALD) using Diethylzinc (DEZn) and water (H2O) as precursors.
format Conference or Workshop Item
author PPKBSM, Pusat Pengajian Bahan & Sumber Mineral
author_facet PPKBSM, Pusat Pengajian Bahan & Sumber Mineral
author_sort PPKBSM, Pusat Pengajian Bahan & Sumber Mineral
title Structural and optical properties of ZnO thin films deposited using atomic layer deposition technique
title_short Structural and optical properties of ZnO thin films deposited using atomic layer deposition technique
title_full Structural and optical properties of ZnO thin films deposited using atomic layer deposition technique
title_fullStr Structural and optical properties of ZnO thin films deposited using atomic layer deposition technique
title_full_unstemmed Structural and optical properties of ZnO thin films deposited using atomic layer deposition technique
title_sort structural and optical properties of zno thin films deposited using atomic layer deposition technique
publishDate 2011
url http://eprints.usm.my/25179/1/STRUCTURAL_AND_OPTICAL_PROPERTIES_OF_ZnO_THIN_FILMS_DEPOSITED_USING_ATOMIC_LAYER_DEPOSITION_TECHNIQUE.pdf
http://eprints.usm.my/25179/
_version_ 1643705772569264128
score 13.188404

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