Performance reduction and discrepancies between supported and suspended 1D photonic-crystal/photonic-wire with medium extended microcavity length

• Main Authors: Nawi, Mohd N., Berhanuddin, Dilla Duryha, Mahdi, Mohd Adzir, Yeop Majlis, Burhanuddin, De La Rue, Richard M., Md Zain, Ahmad Rifqi
• Format: Article
• Published: S P I E - International Society for Optical Engineering 2021
• Online Access: http://psasir.upm.edu.my/id/eprint/94549/; https://www.spiedigitallibrary.org/journals/journal-of-nanophotonics/volume-15/issue-3/036013/Performance-reduction-and-discrepancies-between-supported-and-suspended-1D-photonic/10.1117/1.JNP.15.036013.short

We report the performance of silicon-on-insulator medium-length extended microcavity (3 to 4.5 μm long) one-dimensional photonic crystal waveguide. Quality-factor (Q-factor) values ranging from 2000 to 37,000 were observed. The waveguides/wire were fabricated using an inductively coupled plasma rea...