Lithography method for selective area of CNTs growth
This paper presents the processes of fabrication method in the selective area of growth Carbon Nanotubes (CNTs) on the substrate with an Interdigitated (IDE) electrodes pattern using resist AZ1500. The substrate used in this work was Gallium Phosphate with Chromium (0.021μm) and Platinum (0.11μm) as...
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| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
IEEE
2013
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| Online Access: | http://psasir.upm.edu.my/id/eprint/69515/1/Lithography%20method%20for%20selective%20area%20of%20CNTs%20growth.pdf http://psasir.upm.edu.my/id/eprint/69515/ |
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