Improved dielectric performance of barium strontium titanate multilayered capacitor by means of pulsed laser deposition and slow injection sol-gel methods

• Main Authors: Balachandran, Ruthramurthy, Ong, Boon Hoong, Wong, Hin Yong, Tan, Kar Ban, Yow, Ho Kwang, Lee, Wai Keat
• Format: Article
• Language: English
• Published: Carl Hanser Verlag 2014
• Online Access: http://psasir.upm.edu.my/id/eprint/37974/1/Improved%20dielectric%20performance%20of%20barium%20strontium%20titanate%20multilayered%20capacitor%20by%20means%20of%20pulsed%20laser%20deposition%20and%20slow%20injection%20sol-gel%20methods.pdf; http://psasir.upm.edu.my/id/eprint/37974/; http://www.hanser-elibrary.com/doi/abs/10.3139/146.111045

A Pt/BST/NiFe/Cu multilayered capacitor was fabricated incorporating a polycrystalline Ba0.5Sr0.5TiO3 (BST) film deposited using the pulsed laser deposition technique. Qualitative X-ray diffraction analysis confirmed a perovskite structure for the deposited BST dielectric films which were fired at v...