Plasma polymerization. IV. A systematic investigation of the inductively coupled RF plasma polymerization of pentafluorobenzene

• Main Authors: Clark, D. T., Abrahman, M. Z.
• Format: Article
• Language: English
• Published: John Wiley & Sons, Inc. 1981
• Online Access: http://psasir.upm.edu.my/id/eprint/33912/1/33912%20PLASMA%20POLYMERIZATION%20IV..pdf; http://psasir.upm.edu.my/id/eprint/33912/

The composition and gross structural features of plasma polymer films prepared by inductively coupled RF plasmas excited in pentafluorobenzene were investigated by ESCA as a function of the operating parameters. The rate of film deposition is dependent on the W/FM parameter and on site of deposition. The polymer formed in the glow region shows only small variations in structure as a function of power and pressure. Polymer films deposited in the regions away from the site of primary excitation typically have a higher fluorine content than those formed in the coil region; the stoichiometry for the latter is comparable to that of the starting material.