Facile synthesis of nanostructured WO3 thin films and their characterization for ethanol sensing.

• Main Authors: Yaacob, Mohd. Hanif, Ahmad, Muhammad Zamharir, Sadek, Abu Z., Jian, Z. Ou, Latham, Kay, Wlodarski, Wojtek
• Format: Article
• Language: English; English
• Published: 2013
• Online Access: http://psasir.upm.edu.my/id/eprint/28578/1/Facile%20synthesis%20of%20nanostructured%20WO3%20thin%20films%20and%20their%20characterization%20for%20ethanol%20sensing.pdf; http://psasir.upm.edu.my/id/eprint/28578/

A simple technique to fabricate nanostructured WO3 thin films onto conductomeric transducers has been employed for ethanol sensing application. Initially, pure tungsten (W) thin films were deposited onto the substrate employing RF sputterer and followed by an etching process. Three types of etching...