TiO2 Nanoparticles Prepared by MOCVD: Effect of Temperature, Flowrate, and Precursor.

Titanium dioxide nanoparticles were produced by metal organic chemical vapour deposition method. The effect of deposition temperatures (400–900 °C), flowrates of the carrier gas (200–600 mL/min), and the precursors [titanium (IV) butoxide (TBOT) and titanium tetraisopropoxide (TTIP)] on the particle...

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Bibliographic Details
Main Authors: Othman, Siti Hajar, Abdul Rashid, Suraya, Abdullah, Norhafizah, Mohd Ghazi, Tinia Idaty
Format: Article
Language:English
Published: 2013
Online Access:http://psasir.upm.edu.my/id/eprint/28414/
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