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Particle reduction at metal deposition process in wafer fabrication.

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Main Authors: Abdul Aziz, Faieza, Ahmad, Izham Hazizi, Zulkifli, Norzima, Mohd. Yusuff, Rosnah
Format: Book Section
Published: InTech 2012
Online Access:http://psasir.upm.edu.my/id/eprint/26269/
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id my.upm.eprints.26269
record_format eprints
spelling my.upm.eprints.262692014-03-11T01:02:03Z http://psasir.upm.edu.my/id/eprint/26269/ Particle reduction at metal deposition process in wafer fabrication. Abdul Aziz, Faieza Ahmad, Izham Hazizi Zulkifli, Norzima Mohd. Yusuff, Rosnah InTech Abdul Aziz, Faieza 2012-05-16 Book Section PeerReviewed Abdul Aziz, Faieza and Ahmad, Izham Hazizi and Zulkifli, Norzima and Mohd. Yusuff, Rosnah (2012) Particle reduction at metal deposition process in wafer fabrication. In: Manufacturing System. InTech, Rijeka, Croatia, pp. 1-26. ISBN 9789535105305 10.5772/38239
institution Universiti Putra Malaysia
building UPM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Putra Malaysia
content_source UPM Institutional Repository
url_provider http://psasir.upm.edu.my/
author2 Abdul Aziz, Faieza
author_facet Abdul Aziz, Faieza
Abdul Aziz, Faieza
Ahmad, Izham Hazizi
Zulkifli, Norzima
Mohd. Yusuff, Rosnah
format Book Section
author Abdul Aziz, Faieza
Ahmad, Izham Hazizi
Zulkifli, Norzima
Mohd. Yusuff, Rosnah
spellingShingle Abdul Aziz, Faieza
Ahmad, Izham Hazizi
Zulkifli, Norzima
Mohd. Yusuff, Rosnah
Particle reduction at metal deposition process in wafer fabrication.
author_sort Abdul Aziz, Faieza
title Particle reduction at metal deposition process in wafer fabrication.
title_short Particle reduction at metal deposition process in wafer fabrication.
title_full Particle reduction at metal deposition process in wafer fabrication.
title_fullStr Particle reduction at metal deposition process in wafer fabrication.
title_full_unstemmed Particle reduction at metal deposition process in wafer fabrication.
title_sort particle reduction at metal deposition process in wafer fabrication.
publisher InTech
publishDate 2012
url http://psasir.upm.edu.my/id/eprint/26269/
_version_ 1643828877555924992
score 13.214268

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