Metrology at nanoscale: thermal wave probe made it simple
A major hurdle facing nanotechnology implementation is in how samples of nano-scale dimensions can be probed. Parts of the problems include sample mounting, making contact with the sample; the possibility that the act of measuring alters the sample, repeatability and accuracy of measurement and refe...
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Main Author: | Abd. Moksin, Mohd Maarof |
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Format: | Inaugural Lecture |
Language: | English English |
Published: |
Universiti Putra Malaysia Press
2008
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Online Access: | http://psasir.upm.edu.my/id/eprint/18217/1/cover%20Inaugural%20Dr.Maarof.pdf http://psasir.upm.edu.my/id/eprint/18217/6/PROF.%20MAAROF%20INAUGURAL.pdf http://psasir.upm.edu.my/id/eprint/18217/ |
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