A comparative study on MEMS piezoelectric microgenerators

The growing demand of wireless sensor networks has created the necessity of miniature, portable, long lasting and easily recharged sources of power. Traditional, hazardous batteries are rendered unacceptable and the viability of 'green' MEMS energy harvesters has become even more dominant....

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Main Authors: Ralib A.A.M., Nordin A.N., Salleh H.
Other Authors: 36537608500
Format: Review
Published: 2023
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spelling my.uniten.dspace-307022023-12-29T15:51:34Z A comparative study on MEMS piezoelectric microgenerators Ralib A.A.M. Nordin A.N. Salleh H. 36537608500 7005958999 24067645400 Energy conversion Harvesters Piezoelectric devices Piezoelectricity Vibrations (mechanical) Characteristic equation Comparative studies Conventional batteries Electrical energy Electrical power Energy Harvester Energy scavenger Growing demand High efficiency Long lasting Maximum power output Mechanical vibrations Microgenerators Operating modes Piezoelectric energy Wireless sensor networks The growing demand of wireless sensor networks has created the necessity of miniature, portable, long lasting and easily recharged sources of power. Traditional, hazardous batteries are rendered unacceptable and the viability of 'green' MEMS energy harvesters has become even more dominant. This paper reviews the state-of-theart MEMS piezoelectric energy harvesters which promise a cleaner environment and eliminate the disposal issue of conventional batteries. Piezoelectric devices are the perfect candidate for implementation in micro generators as they are easily fabricated, are silicon compatible and demonstrate high efficiencies for mechanical to electrical energy conversion. The characteristic equations which govern the conversion of mechanical vibration to electrical power are described in this paper. The typical operating modes for MEMS piezoelectric energy cantilevers which are namely; d31 and d33 are also detailed. Criteria for optimum material suitable for MEMS energy scavengers to produce maximum power output are also outlined. Several MEMS energy harvesters which have been successfully fabricated and tested are also critically reviewed in this paper. Finally a comparison table highlighting the advantages and disadvantages of each work is presented. � Springer-Verlag 2010. Final 2023-12-29T07:51:34Z 2023-12-29T07:51:34Z 2010 Review 10.1007/s00542-010-1086-9 2-s2.0-78149407459 https://www.scopus.com/inward/record.uri?eid=2-s2.0-78149407459&doi=10.1007%2fs00542-010-1086-9&partnerID=40&md5=53d4a3ef45f2af1811b83972e8f095e6 https://irepository.uniten.edu.my/handle/123456789/30702 16 10 1673 1681 Scopus
institution Universiti Tenaga Nasional
building UNITEN Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Tenaga Nasional
content_source UNITEN Institutional Repository
url_provider http://dspace.uniten.edu.my/
topic Energy conversion
Harvesters
Piezoelectric devices
Piezoelectricity
Vibrations (mechanical)
Characteristic equation
Comparative studies
Conventional batteries
Electrical energy
Electrical power
Energy Harvester
Energy scavenger
Growing demand
High efficiency
Long lasting
Maximum power output
Mechanical vibrations
Microgenerators
Operating modes
Piezoelectric energy
Wireless sensor networks
spellingShingle Energy conversion
Harvesters
Piezoelectric devices
Piezoelectricity
Vibrations (mechanical)
Characteristic equation
Comparative studies
Conventional batteries
Electrical energy
Electrical power
Energy Harvester
Energy scavenger
Growing demand
High efficiency
Long lasting
Maximum power output
Mechanical vibrations
Microgenerators
Operating modes
Piezoelectric energy
Wireless sensor networks
Ralib A.A.M.
Nordin A.N.
Salleh H.
A comparative study on MEMS piezoelectric microgenerators
description The growing demand of wireless sensor networks has created the necessity of miniature, portable, long lasting and easily recharged sources of power. Traditional, hazardous batteries are rendered unacceptable and the viability of 'green' MEMS energy harvesters has become even more dominant. This paper reviews the state-of-theart MEMS piezoelectric energy harvesters which promise a cleaner environment and eliminate the disposal issue of conventional batteries. Piezoelectric devices are the perfect candidate for implementation in micro generators as they are easily fabricated, are silicon compatible and demonstrate high efficiencies for mechanical to electrical energy conversion. The characteristic equations which govern the conversion of mechanical vibration to electrical power are described in this paper. The typical operating modes for MEMS piezoelectric energy cantilevers which are namely; d31 and d33 are also detailed. Criteria for optimum material suitable for MEMS energy scavengers to produce maximum power output are also outlined. Several MEMS energy harvesters which have been successfully fabricated and tested are also critically reviewed in this paper. Finally a comparison table highlighting the advantages and disadvantages of each work is presented. � Springer-Verlag 2010.
author2 36537608500
author_facet 36537608500
Ralib A.A.M.
Nordin A.N.
Salleh H.
format Review
author Ralib A.A.M.
Nordin A.N.
Salleh H.
author_sort Ralib A.A.M.
title A comparative study on MEMS piezoelectric microgenerators
title_short A comparative study on MEMS piezoelectric microgenerators
title_full A comparative study on MEMS piezoelectric microgenerators
title_fullStr A comparative study on MEMS piezoelectric microgenerators
title_full_unstemmed A comparative study on MEMS piezoelectric microgenerators
title_sort comparative study on mems piezoelectric microgenerators
publishDate 2023
_version_ 1806427376020619264
score 13.222552