Design, simulation and fabrication of piezoelectric micro generators for aero acoustic applications

• Main Authors: Ralib A.A.M., Nordin A.N., Othman R., Salleh H.
• Other Authors: 36537608500
• Format: Conference paper
• Published: 2023
• Subjects: Acoustic devices; Design; Harvesters; Open circuit voltage; Piezoelectricity; Scanning electron microscopy; Sensor nodes; Sensors; Stainless steel; Telecommunication equipment; X ray diffraction; Zinc oxide; Acoustic application; Acoustic Sensors; Acoustic vibration; Copper electrodes; Electrical power; Energy Harvester; Experimental measurements; Finite element modelling; High-frequency sounds; MEMS fabrication; Microgenerators; Monitoring system; Niche applications; Noise detection; Output voltages; Piezoelectric thin films; Power levels; Self-powered; Simulation result; Stainless steel substrates; Vibration frequency; Acoustic noise

Energy harvesters based on acoustic vibration sources can generate electrical power through piezoelectric transduction. Significant miniaturization of electro mechanical devices using MEMS fabrication technology has encouraged the creation of portable, miniature energy harvesters. A niche applicatio...