Design and fabrication of a quasi-ordered nanoporous silicon membrane suitable for thermally induced drug release

• Main Authors: Chau C.F., Melvin T.
• Other Authors: 25824209000
• Format: Article
• Published: 2023
• Subjects: Design; Electromechanical devices; MEMS; Porous silicon; Silicon wafers; Temperature sensors; Deleterious effects; Drug release; Fabrication methodology; Hexagonal close-packed; Integrated heater; Nano-porous silicon; Nanoporous structures; Nearest neighbour; Porous membranes; Sensor designs; Thermally induced; Uniform diameter; Fabrication

The design and fabrication of an ordered nanoporous silicon membrane and integrated heater and temperature sensor is described. The methodology for fabrication of the nanoporous structure has been developed for integration within microelectromechanical systems. The structure is fabricated from a 500...