Interplay between variable direct current sputtering deposition process parameters and properties of ZnO:Ga thin films
Gallium-doped zinc oxide (GZO) is a potential transparent conductive oxide material suitable for modern photovoltaics among other applications. In this study, GZO thin films were deposited by a confocal direct current sputtering system to investigate the effects of various deposition parameters such...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2018
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| Online Access: | http://dspace.uniten.edu.my/jspui/handle/123456789/11132 |
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