Comparison on various developing method at clean track ACT 8 based on 0.5um CMOS Technology

• Main Authors: Nazrah, Omar, Muhammad Hilmi, Othman, Anifah, Zakaria
• Other Authors: [e-mail]
• Format: Working Paper
• Language: English
• Published: Universiti Malaysia Perlis 2010
• Subjects: Developing method; CD Sem; Wafer; Coater; Stepper; International Conference on X-Rays & Related Techniques in Research & Industry (ICXRI)
• Online Access: http://dspace.unimap.edu.my/xmlui/handle/123456789/9015

International Conference on X-Rays and Related Techniques in Research and Industry (ICXRI 2010) jointly organized by Universiti Malaysia Perlis (UniMAP) and X-Ray Application Malaysia Society (XAPP), 9th - 10th June 2010 at Aseania Resort Langkawi, Malaysia.