Polysilicon process development for floating gate memory devices

• Main Authors: Zarimawaty, Zailan, Ramzan, Mat Ayub, Mohd Rosydi, Zakaria
• Format: Working Paper
• Language: English
• Published: Universiti Malaysia Pahang 2010
• Subjects: Polycrystalline silicon; Amorphous silicon; PECVD; Malaysian Technical Universities Conference on Engineering and Technology (MUCEET)
• Online Access: http://dspace.unimap.edu.my/xmlui/handle/123456789/8656

Malaysian Technical Universities Conference on Engineering and Technology organized by Universiti Malaysia Pahang in collaboration with Universiti Tun Hussein Onn Malaysia, Universiti Teknikal Malaysia Melaka & Universiti Malaysia Perlis on June 20th - 22nd, 2009, at MS Garden Hotel, Kuantan, P...