A very high Q-factor inductor using MEMS technology
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2010
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my.unimap-84352010-08-03T04:23:37Z A very high Q-factor inductor using MEMS technology Khalid, N. Singh, J. Le, H.P. Devlin, J. Zaliman, Sauli, Prof. Madya Capacitive couplings GHz frequencies High Q factor High quality High resistivity MEMS technology Optimisations Q-factors Substrate loss Symmetric inductors Link to publisher's homepage at http://ieeexplore.ieee.org/ This paper presents the design and optimisation of a very high Quality (Q) factor inductor using MEMS technology for 10GHz to 20GHz frequency band. The effects of various parameters of a symmetric inductor structure on the Q-factor and inductance are thoroughly analysed. The inductor has been designed on Sillcon-on-Sapphire (SOS) substrate because it offers superior characteristics of low substrate loss due to the high resistivity of the sapphire material and low capacitive coupling to the substrate. It is also been suspended from the substrate in order to reduce the substrate loss and improved the Q factor. Results indicate that a maximum Q factor of 192 for a 1.13nH inductance at 12GHz is achieved after optimising the symmetric inductor. 2010-08-03T04:23:37Z 2010-08-03T04:23:37Z 2009-01-19 Working Paper p. 77-80 978-142444669-8 http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?arnumber=5397444 http://hdl.handle.net/123456789/8435 en Proceedings of 1st Asia Pacific Conference on Postgraduate Research in Microelectronics and Electronics, PrimeAsia 2009 IEEE |
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Universiti Malaysia Perlis |
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Asia |
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Malaysia |
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Universiti Malaysia Perlis |
| content_source |
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http://dspace.unimap.edu.my/ |
| language |
English |
| topic |
Capacitive couplings GHz frequencies High Q factor High quality High resistivity MEMS technology Optimisations Q-factors Substrate loss Symmetric inductors |
| spellingShingle |
Capacitive couplings GHz frequencies High Q factor High quality High resistivity MEMS technology Optimisations Q-factors Substrate loss Symmetric inductors Khalid, N. Singh, J. Le, H.P. Devlin, J. Zaliman, Sauli, Prof. Madya A very high Q-factor inductor using MEMS technology |
| description |
Link to publisher's homepage at http://ieeexplore.ieee.org/ |
| format |
Working Paper |
| author |
Khalid, N. Singh, J. Le, H.P. Devlin, J. Zaliman, Sauli, Prof. Madya |
| author_facet |
Khalid, N. Singh, J. Le, H.P. Devlin, J. Zaliman, Sauli, Prof. Madya |
| author_sort |
Khalid, N. |
| title |
A very high Q-factor inductor using MEMS technology |
| title_short |
A very high Q-factor inductor using MEMS technology |
| title_full |
A very high Q-factor inductor using MEMS technology |
| title_fullStr |
A very high Q-factor inductor using MEMS technology |
| title_full_unstemmed |
A very high Q-factor inductor using MEMS technology |
| title_sort |
very high q-factor inductor using mems technology |
| publisher |
IEEE |
| publishDate |
2010 |
| url |
http://dspace.unimap.edu.my/xmlui/handle/123456789/8435 |
| _version_ |
1643789184936181760 |
| score |
13.214268 |