Cover Image

Theoretical and experimental study towards fabrication of nanogap dielectric biosensor by reversed spacer lithography

International Conference on Advancement of Materials and Nanotechnology (ICAMN) 2007, 29th May - 1st June 2007 was held at Pulau Langkawi, Kedah, Malaysia. Link to publisher's homepage at http://proceedings.aip.org/

Saved in:
Bibliographic Details
Main Authors: Uda, Hashim, Prof. Dr., Muhamad Emi Azri, Shohini
Format: Working Paper
Language:English
Published: American Institute of Physics 2010
Subjects:
DNA hybridization
Lab-on-a-chip
Nanogap
Reverse spacer lithographic
Spacer patterning technology
International Conference on Advancement of Materials and Nanotechnology 2007
ICAMN 2007
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/8205
Tags: Add Tag
No Tags, Be the first to tag this record!
id my.unimap-8205
record_format dspace
spelling my.unimap-82052013-11-20T04:01:04Z Theoretical and experimental study towards fabrication of nanogap dielectric biosensor by reversed spacer lithography Uda, Hashim, Prof. Dr. Muhamad Emi Azri, Shohini DNA hybridization Lab-on-a-chip Nanogap Reverse spacer lithographic Spacer patterning technology International Conference on Advancement of Materials and Nanotechnology 2007 ICAMN 2007 International Conference on Advancement of Materials and Nanotechnology (ICAMN) 2007, 29th May - 1st June 2007 was held at Pulau Langkawi, Kedah, Malaysia. Link to publisher's homepage at http://proceedings.aip.org/ A reversed spacer patterning technology using a sacrificial layer and a chemical vapor deposition (CVD) spacer layer has been developed, and is demonstrated to achieve sub-50 nm structures with conventional dry etching. The minimum-sized features are defined not by the photolithography but by the CVD film thickness. Therefore, this technology yields critical dimension (CD) variations of minimum-sized features much smaller than that achieved by conventional optical or e-beam lithography and has a great potential to fabricate a nanosystems for the electrical detection of biomolecular interactions. 2010-07-06T02:15:53Z 2010-07-06T02:15:53Z 2010-03-11 Working Paper AIP Conference Proceedings, vol.1217 (1), 2010, pages 505-509 978-073540760-2 0094-243X http://link.aip.org/link/?APCPCS/1217/505/1 http://hdl.handle.net/123456789/8205 en Proceedings of International Conference on Advancement of Materials and Nanotechnology (ICAMN) 2007 American Institute of Physics
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic DNA hybridization
Lab-on-a-chip
Nanogap
Reverse spacer lithographic
Spacer patterning technology
International Conference on Advancement of Materials and Nanotechnology 2007
ICAMN 2007
spellingShingle DNA hybridization
Lab-on-a-chip
Nanogap
Reverse spacer lithographic
Spacer patterning technology
International Conference on Advancement of Materials and Nanotechnology 2007
ICAMN 2007
Uda, Hashim, Prof. Dr.
Muhamad Emi Azri, Shohini
Theoretical and experimental study towards fabrication of nanogap dielectric biosensor by reversed spacer lithography
description International Conference on Advancement of Materials and Nanotechnology (ICAMN) 2007, 29th May - 1st June 2007 was held at Pulau Langkawi, Kedah, Malaysia. Link to publisher's homepage at http://proceedings.aip.org/
format Working Paper
author Uda, Hashim, Prof. Dr.
Muhamad Emi Azri, Shohini
author_facet Uda, Hashim, Prof. Dr.
Muhamad Emi Azri, Shohini
author_sort Uda, Hashim, Prof. Dr.
title Theoretical and experimental study towards fabrication of nanogap dielectric biosensor by reversed spacer lithography
title_short Theoretical and experimental study towards fabrication of nanogap dielectric biosensor by reversed spacer lithography
title_full Theoretical and experimental study towards fabrication of nanogap dielectric biosensor by reversed spacer lithography
title_fullStr Theoretical and experimental study towards fabrication of nanogap dielectric biosensor by reversed spacer lithography
title_full_unstemmed Theoretical and experimental study towards fabrication of nanogap dielectric biosensor by reversed spacer lithography
title_sort theoretical and experimental study towards fabrication of nanogap dielectric biosensor by reversed spacer lithography
publisher American Institute of Physics
publishDate 2010
url http://dspace.unimap.edu.my/xmlui/handle/123456789/8205
_version_ 1643789093601017856
score 13.214268

Similar Items