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Design and Fabrication of MEMS Micro Switch for Rf Applications

Prof. Madya Zaliman Sauli and his team from School of Mechatronic Engineering won bronze for Design and Fabrication of MEMS Micro Switch for Rf Applications. ITEX 2006, 19th - 21st May 2006 was held at Kuala Lumpur Convention Centre (KLCC), Kuala Lumpur.

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Bibliographic Details
Main Authors: Zaliman, Sauli, Prof. Madya, Hasnizah, Aris, Razaidi, Hussin, Mohd Hafiz, Ismail, Rizalafande, Che Ismail
Other Authors: zaliman@unimap.edu.my
Format: Image
Language:English
Published: Malaysian Invention & Design Society (MINDS) 2010
Subjects:
MEMS Micro Switch
Micro Switch
Switches
UniMAP > Research
ITEX
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/8070
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record_format dspace
spelling my.unimap-80702010-06-07T01:48:31Z Design and Fabrication of MEMS Micro Switch for Rf Applications Zaliman, Sauli, Prof. Madya Hasnizah, Aris Razaidi, Hussin Mohd Hafiz, Ismail Rizalafande, Che Ismail zaliman@unimap.edu.my MEMS Micro Switch Micro Switch Switches UniMAP -- Research ITEX Prof. Madya Zaliman Sauli and his team from School of Mechatronic Engineering won bronze for Design and Fabrication of MEMS Micro Switch for Rf Applications. ITEX 2006, 19th - 21st May 2006 was held at Kuala Lumpur Convention Centre (KLCC), Kuala Lumpur. MEMS Micro Switch is fabricated on a high-resistivity silicon substrate. A thin layer of polysilicon is deposited and patterned to define the top electrode. 2010-06-02T08:27:05Z 2010-06-02T08:27:05Z 2006 Image http://hdl.handle.net/123456789/8070 en 17th International Invention, Innovation, Industrial Design & Technology Exhibition 2006 (ITEX 2006) Malaysian Invention & Design Society (MINDS)
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic MEMS Micro Switch
Micro Switch
Switches
UniMAP -- Research
ITEX
spellingShingle MEMS Micro Switch
Micro Switch
Switches
UniMAP -- Research
ITEX
Zaliman, Sauli, Prof. Madya
Hasnizah, Aris
Razaidi, Hussin
Mohd Hafiz, Ismail
Rizalafande, Che Ismail
Design and Fabrication of MEMS Micro Switch for Rf Applications
description Prof. Madya Zaliman Sauli and his team from School of Mechatronic Engineering won bronze for Design and Fabrication of MEMS Micro Switch for Rf Applications. ITEX 2006, 19th - 21st May 2006 was held at Kuala Lumpur Convention Centre (KLCC), Kuala Lumpur.
author2 zaliman@unimap.edu.my
author_facet zaliman@unimap.edu.my
Zaliman, Sauli, Prof. Madya
Hasnizah, Aris
Razaidi, Hussin
Mohd Hafiz, Ismail
Rizalafande, Che Ismail
format Image
author Zaliman, Sauli, Prof. Madya
Hasnizah, Aris
Razaidi, Hussin
Mohd Hafiz, Ismail
Rizalafande, Che Ismail
author_sort Zaliman, Sauli, Prof. Madya
title Design and Fabrication of MEMS Micro Switch for Rf Applications
title_short Design and Fabrication of MEMS Micro Switch for Rf Applications
title_full Design and Fabrication of MEMS Micro Switch for Rf Applications
title_fullStr Design and Fabrication of MEMS Micro Switch for Rf Applications
title_full_unstemmed Design and Fabrication of MEMS Micro Switch for Rf Applications
title_sort design and fabrication of mems micro switch for rf applications
publisher Malaysian Invention & Design Society (MINDS)
publishDate 2010
url http://dspace.unimap.edu.my/xmlui/handle/123456789/8070
_version_ 1643789024771440640
score 13.222552

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