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MEMS piezoresistive accelerometer sensor for gait analysis

Master of Science in Microelectronic Systems Design Engineering

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Bibliographic Details
Main Author: Siti Nurdiyana, Abd. Rashid
Other Authors: Yufridin, Wahab, Assoc. Prof. Dr.
Format: Dissertation
Language:English
Published: Universiti Malaysia Perlis (UniMAP) 2017
Subjects:
Microelectromechanical systems
Accelerometers
Gait in humans
Piezoelectric materials
Online Access:http://dspace.unimap.edu.my:80/xmlui/handle/123456789/76625
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spelling my.unimap-766252022-10-26T00:42:22Z MEMS piezoresistive accelerometer sensor for gait analysis Siti Nurdiyana, Abd. Rashid Yufridin, Wahab, Assoc. Prof. Dr. Microelectromechanical systems Accelerometers Gait in humans Piezoelectric materials Master of Science in Microelectronic Systems Design Engineering Microelectromechanical Systems (MEMS) based accelerometers have been reported as one of the most popular applications in sensing methods. For establishing the microsystem technology, Finite Element Analysis (FEA) has been reported as the most time and cost effective way to build a model for simulation. Present work focuses on designs, analysis and simulations of MEMS piezoresistive accelerometer sensor for gait analysis of different size. The structure of the accelerometer is chosen to reduce the cross-axis sensitivity by selecting an appropriate material and suitable design parameters. The accelerometers are doped with p-type (boron diffused) silicon as their piezoresistor. A solid model has been simulated using COMSOL Multiphysics software to find von mises stress, displacement and sensitivity of the proposed designs. The designed accelerometers are based on the piezoresistive effect where the value of a resistor changes with applied mechanical stress. The changes in the resistors values are then converted to an output voltage using a Wheatstone bridge. The simulation shows that Design 1 has maximum value of spring constant and maximum displacement which is 91800N/m and 9.21x10-8 μm respectively. Design 2 has maximum value of Von mises stress which is 0.001684MPa while Design 3 has the lowest value of spring constant, 3400N/m. 2017 2022-10-26T00:42:22Z 2022-10-26T00:42:22Z Dissertation http://dspace.unimap.edu.my:80/xmlui/handle/123456789/76625 en Universiti Malaysia Perlis (UniMAP) Universiti Malaysia Perlis (UniMAP) School of Microelectronic Engineering
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Microelectromechanical systems
Accelerometers
Gait in humans
Piezoelectric materials
spellingShingle Microelectromechanical systems
Accelerometers
Gait in humans
Piezoelectric materials
Siti Nurdiyana, Abd. Rashid
MEMS piezoresistive accelerometer sensor for gait analysis
description Master of Science in Microelectronic Systems Design Engineering
author2 Yufridin, Wahab, Assoc. Prof. Dr.
author_facet Yufridin, Wahab, Assoc. Prof. Dr.
Siti Nurdiyana, Abd. Rashid
format Dissertation
author Siti Nurdiyana, Abd. Rashid
author_sort Siti Nurdiyana, Abd. Rashid
title MEMS piezoresistive accelerometer sensor for gait analysis
title_short MEMS piezoresistive accelerometer sensor for gait analysis
title_full MEMS piezoresistive accelerometer sensor for gait analysis
title_fullStr MEMS piezoresistive accelerometer sensor for gait analysis
title_full_unstemmed MEMS piezoresistive accelerometer sensor for gait analysis
title_sort mems piezoresistive accelerometer sensor for gait analysis
publisher Universiti Malaysia Perlis (UniMAP)
publishDate 2017
url http://dspace.unimap.edu.my:80/xmlui/handle/123456789/76625
_version_ 1751537951819431936
score 13.222552

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