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Fabrication of carbon nanotube field-effect transistor using shadow mask technique

Link to publisher's homepage at http://ijneam.unimap.edu.my

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Main Authors: Navneet, Gupta, Ankita, Dixit, Suraj, Baloda
Other Authors: ngupta@pilani.bits-pilani.ac.in
Format: Article
Language:English
Published: Universiti Malaysia Perlis (UniMAP) 2022
Subjects:
CNT
Interdigitated electrode
Multichannel Carbon Nanotube Field Effect Transistor
Shadow Mask Technique
Online Access:http://dspace.unimap.edu.my:80/xmlui/handle/123456789/76370
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spelling my.unimap-763702022-10-07T02:40:02Z Fabrication of carbon nanotube field-effect transistor using shadow mask technique Navneet, Gupta Ankita, Dixit Suraj, Baloda ngupta@pilani.bits-pilani.ac.in Department of Electrical and Electronics Engineering, Birla Institute of Technology and Science, Pilani Rajasthan, India CNT Interdigitated electrode Multichannel Carbon Nanotube Field Effect Transistor Shadow Mask Technique Link to publisher's homepage at http://ijneam.unimap.edu.my In this work, a new approach based on shadow mask has been reported for fabricating low-cost carbon nanotube field-effect transistor (CNFET) with interdigitated source and drain electrodes. The drop cast method is used for depositing CNTs, which was characterized using Field Emission Scanning Electron Microscope (FESEM) and RAMAN spectroscopy. The RAMAN spectroscopy confirms the deposition of CNT and SEM images demonstrated the deposition of CNT network on dielectric layer without using O2 plasma etching. Further, Keithley 4200 SCS parameter analyzer was used to perform the electrical characterization of the fabricated device. The results indicated that the fabricated CNFET follow the trend of p-type multichannel CNFET. 2022-10-07T02:40:02Z 2022-10-07T02:40:02Z 2022-07 Article International Journal of Nanoelectronics and Materials, vol.15(3), 2022, pages 189-196 1985-5761 (Printed) 2232-1535 (online) http://dspace.unimap.edu.my:80/xmlui/handle/123456789/76370 en Universiti Malaysia Perlis (UniMAP)
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic CNT
Interdigitated electrode
Multichannel Carbon Nanotube Field Effect Transistor
Shadow Mask Technique
spellingShingle CNT
Interdigitated electrode
Multichannel Carbon Nanotube Field Effect Transistor
Shadow Mask Technique
Navneet, Gupta
Ankita, Dixit
Suraj, Baloda
Fabrication of carbon nanotube field-effect transistor using shadow mask technique
description Link to publisher's homepage at http://ijneam.unimap.edu.my
author2 ngupta@pilani.bits-pilani.ac.in
author_facet ngupta@pilani.bits-pilani.ac.in
Navneet, Gupta
Ankita, Dixit
Suraj, Baloda
format Article
author Navneet, Gupta
Ankita, Dixit
Suraj, Baloda
author_sort Navneet, Gupta
title Fabrication of carbon nanotube field-effect transistor using shadow mask technique
title_short Fabrication of carbon nanotube field-effect transistor using shadow mask technique
title_full Fabrication of carbon nanotube field-effect transistor using shadow mask technique
title_fullStr Fabrication of carbon nanotube field-effect transistor using shadow mask technique
title_full_unstemmed Fabrication of carbon nanotube field-effect transistor using shadow mask technique
title_sort fabrication of carbon nanotube field-effect transistor using shadow mask technique
publisher Universiti Malaysia Perlis (UniMAP)
publishDate 2022
url http://dspace.unimap.edu.my:80/xmlui/handle/123456789/76370
_version_ 1751537918148608000
score 13.160551

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