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The design and analysis of high Q factor film bulk acoustic wave resonator for filter in super high frequency

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Main Authors: N.I.M., Nor, N., Khalid, N. A., Hashim, S., Kasjoo, Z., Sauli, Lam, Hok Lang, Chow, Shi Qi
Other Authors: izza@unimap.edu.my
Format: Article
Language:English
Published: Universiti Malaysia Perlis (UniMAP) 2022
Subjects:
Film bulk acoustic wave resonator
Quality factor
High frequency
Online Access:http://dspace.unimap.edu.my:80/xmlui/handle/123456789/75225
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spelling my.unimap-752252022-05-13T08:20:21Z The design and analysis of high Q factor film bulk acoustic wave resonator for filter in super high frequency N.I.M., Nor N., Khalid N. A., Hashim S., Kasjoo Z., Sauli Lam, Hok Lang Chow, Shi Qi izza@unimap.edu.my Film bulk acoustic wave resonator Quality factor High frequency Link to publisher's homepage at http://ijneam.unimap.edu.my Filtering process is one of the highlighted issues when the operating frequency is up to medium or high GHz range in wireless transceiver system. The development of high performance, small size, filter on chip operating in GHz frequency range is the requirement of present and future wireless transceiver systems. The conventional frequency bands, below 6 GHz are already congested, thus, to satisfy this demand, the research into transceiver systems working at frequencies higher than 6 GHz has been growing. Therefore, this work proposed the design and optimization of film bulk acoustic wave resonator (FBAR) operating in frequency 7 GHz to 10 GHz with high quality (Q) factor. The effect of using different geometrical parameters to achieve high Q factor FBAR in these frequency bands is analysed. The designed FBAR achieved Q factor of 1767 at 7 GHz and 1237 at 10 GHz by using aluminium nitride as the piezoelectric thin film and molybdenum as the electrode. 2022-05-13T08:20:21Z 2022-05-13T08:20:21Z 2021-12 Article International Journal of Nanoelectronics and Materials, vol.14 (Special Issue), 2021, pages 79-85 1985-5761 (Printed) 1997-4434 (Online) http://dspace.unimap.edu.my:80/xmlui/handle/123456789/75225 http://ijneam.unimap.edu.my en Universiti Malaysia Perlis (UniMAP)
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Film bulk acoustic wave resonator
Quality factor
High frequency
spellingShingle Film bulk acoustic wave resonator
Quality factor
High frequency
N.I.M., Nor
N., Khalid
N. A., Hashim
S., Kasjoo
Z., Sauli
Lam, Hok Lang
Chow, Shi Qi
The design and analysis of high Q factor film bulk acoustic wave resonator for filter in super high frequency
description Link to publisher's homepage at http://ijneam.unimap.edu.my
author2 izza@unimap.edu.my
author_facet izza@unimap.edu.my
N.I.M., Nor
N., Khalid
N. A., Hashim
S., Kasjoo
Z., Sauli
Lam, Hok Lang
Chow, Shi Qi
format Article
author N.I.M., Nor
N., Khalid
N. A., Hashim
S., Kasjoo
Z., Sauli
Lam, Hok Lang
Chow, Shi Qi
author_sort N.I.M., Nor
title The design and analysis of high Q factor film bulk acoustic wave resonator for filter in super high frequency
title_short The design and analysis of high Q factor film bulk acoustic wave resonator for filter in super high frequency
title_full The design and analysis of high Q factor film bulk acoustic wave resonator for filter in super high frequency
title_fullStr The design and analysis of high Q factor film bulk acoustic wave resonator for filter in super high frequency
title_full_unstemmed The design and analysis of high Q factor film bulk acoustic wave resonator for filter in super high frequency
title_sort design and analysis of high q factor film bulk acoustic wave resonator for filter in super high frequency
publisher Universiti Malaysia Perlis (UniMAP)
publishDate 2022
url http://dspace.unimap.edu.my:80/xmlui/handle/123456789/75225
_version_ 1738511722061234176
score 13.214268

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