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CMOS standby leakage current problems in microcontroller device

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Bibliographic Details
Main Authors: Hazian, Mamat, Zaliman, Sauli
Other Authors: hazian@mimos.my
Format: Working Paper
Language:English
Published: Institute of Electrical and Electronics Engineering (IEEE) 2009
Subjects:
CMOS logic circuits
Dielectric thin films
Integrated circuit yield
Leakage currents
Microcontrollers
Resists
CMOS logic processing
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/7404
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spelling my.unimap-74042010-11-24T02:22:31Z CMOS standby leakage current problems in microcontroller device Hazian, Mamat Zaliman, Sauli hazian@mimos.my CMOS logic circuits Dielectric thin films Integrated circuit yield Leakage currents Microcontrollers Resists CMOS logic processing Link to publisher's homepage at http://ieeexplore.ieee.org Microcontrollers are popular devices uses in small electronic applications. The microcontroller device using CMOS logic processing with 3 metal layers and without CMP tools it makes planarization of ILD's become tougher to handle with SOG machine alone. Most low yield happens when planarization of ILD's layer is not consistence. The standby leakage current was suspected from inter metal dielectric thickness and via 2 resist removal process, which cause the metal line shorting. Investigation has been made and our studies have been carried out to determine the root cause for standby leakage current problem which cause the yield to drop. By using AIT scanning machine, FESEM, thickness, solvent optimization, we are able to prove the root cause for one of the yield killer. 2009-12-11T07:58:30Z 2009-12-11T07:58:30Z 2008-11-25 Working Paper p.631-633 978-1-4244-3873-0 http://ieeexplore.ieee.org/xpls/abs_all.jsp?=&arnumber=4770405 http://hdl.handle.net/123456789/7404 en Proceedings of the International Conference on Semiconductor Electronics (ICSE 08) Institute of Electrical and Electronics Engineering (IEEE)
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic CMOS logic circuits
Dielectric thin films
Integrated circuit yield
Leakage currents
Microcontrollers
Resists
CMOS logic processing
spellingShingle CMOS logic circuits
Dielectric thin films
Integrated circuit yield
Leakage currents
Microcontrollers
Resists
CMOS logic processing
Hazian, Mamat
Zaliman, Sauli
CMOS standby leakage current problems in microcontroller device
description Link to publisher's homepage at http://ieeexplore.ieee.org
author2 hazian@mimos.my
author_facet hazian@mimos.my
Hazian, Mamat
Zaliman, Sauli
format Working Paper
author Hazian, Mamat
Zaliman, Sauli
author_sort Hazian, Mamat
title CMOS standby leakage current problems in microcontroller device
title_short CMOS standby leakage current problems in microcontroller device
title_full CMOS standby leakage current problems in microcontroller device
title_fullStr CMOS standby leakage current problems in microcontroller device
title_full_unstemmed CMOS standby leakage current problems in microcontroller device
title_sort cmos standby leakage current problems in microcontroller device
publisher Institute of Electrical and Electronics Engineering (IEEE)
publishDate 2009
url http://dspace.unimap.edu.my/xmlui/handle/123456789/7404
_version_ 1643788805124128768
score 13.214268

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