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Design and fabrication of Nanowire-based conductance biosensor using spacer patterning technique

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Main Authors: Uda, Hashim, Shahrir, Salleh, Siti Fatimah, Abd Rahman, Amir Razif Arief, Jamil Abdullah
Other Authors: uda@unimap.edu.my
Format: Working Paper
Language:English
Published: Institute of Electrical and Electronics Engineering (IEEE) 2009
Subjects:
Biosensors
DNA hybridization
Nanowires
Spacer patterning
CMOS integrated circuits
Scanning electron microscopy (SEM)
Electron beams
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/7401
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spelling my.unimap-74012014-09-02T07:49:14Z Design and fabrication of Nanowire-based conductance biosensor using spacer patterning technique Uda, Hashim Shahrir, Salleh Siti Fatimah, Abd Rahman Amir Razif Arief, Jamil Abdullah uda@unimap.edu.my Biosensors DNA hybridization Nanowires Spacer patterning CMOS integrated circuits Scanning electron microscopy (SEM) Electron beams Link to publisher's homepage at http://ieeexplore.ieee.org Materials have different behaviours and properties at the nanoscales (1-100nm). New theories and discoveries have been found in designing and fabricating at these sizes. Silicon Nanowires has allowed the introduction of many new signal transduction technologies in biosensors. The design and fabrication of this Silicon Nanowire have been improved by sacrificial layer patterning using commercial photolithigraphy with soda lime chrome mask, controlled etch-back process after photolithography for the spacer formation and lastly the Nanowire formation using the spacer as the next mask without having to use the costly electron-beam technique. The Nanowire will act a sensing electrode for detecting DNA hybridization through its conductivity at the atomic level. Scanning Electron Microscope (SEM) is used for inspection since the size is too small and hardly to be seen even using high power microscopy. The design and fabrication of nanowire biosensor using spacer patterning lithography (SPL) requires appropriate material selection and methodology. For this reason, we clarify the new design of photomasks and indicate the process flow with material that is appropriate to fabricate nanowire conductance biosensor using conventional CMOS process. The process flow involving every step in SPL including the deposition of a sacrificial layer, the sharpness of vertical sidewall by etch-back process, the deposition of a conformal layer, final anisotropic etching and formation of gold pad by PVD and lift-off process. 2009-12-11T03:42:35Z 2009-12-11T03:42:35Z 2008-12-01 Working Paper p.1-5 978-1-4244-2315-6 http://ieeexplore.ieee.org/search/wrapper.jsp?arnumber=4786647 http://hdl.handle.net/123456789/7401 en Proceedings of the International Conference on Electronic Design (ICED 2008) Institute of Electrical and Electronics Engineering (IEEE)
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Biosensors
DNA hybridization
Nanowires
Spacer patterning
CMOS integrated circuits
Scanning electron microscopy (SEM)
Electron beams
spellingShingle Biosensors
DNA hybridization
Nanowires
Spacer patterning
CMOS integrated circuits
Scanning electron microscopy (SEM)
Electron beams
Uda, Hashim
Shahrir, Salleh
Siti Fatimah, Abd Rahman
Amir Razif Arief, Jamil Abdullah
Design and fabrication of Nanowire-based conductance biosensor using spacer patterning technique
description Link to publisher's homepage at http://ieeexplore.ieee.org
author2 uda@unimap.edu.my
author_facet uda@unimap.edu.my
Uda, Hashim
Shahrir, Salleh
Siti Fatimah, Abd Rahman
Amir Razif Arief, Jamil Abdullah
format Working Paper
author Uda, Hashim
Shahrir, Salleh
Siti Fatimah, Abd Rahman
Amir Razif Arief, Jamil Abdullah
author_sort Uda, Hashim
title Design and fabrication of Nanowire-based conductance biosensor using spacer patterning technique
title_short Design and fabrication of Nanowire-based conductance biosensor using spacer patterning technique
title_full Design and fabrication of Nanowire-based conductance biosensor using spacer patterning technique
title_fullStr Design and fabrication of Nanowire-based conductance biosensor using spacer patterning technique
title_full_unstemmed Design and fabrication of Nanowire-based conductance biosensor using spacer patterning technique
title_sort design and fabrication of nanowire-based conductance biosensor using spacer patterning technique
publisher Institute of Electrical and Electronics Engineering (IEEE)
publishDate 2009
url http://dspace.unimap.edu.my/xmlui/handle/123456789/7401
_version_ 1643788803841720320
score 13.160551

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