Rapid response room temperature oxygen sensor based on Trivalent-Elements doped TiO2 thin film
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my.unimap-729502021-12-20T07:05:58Z Rapid response room temperature oxygen sensor based on Trivalent-Elements doped TiO2 thin film Nor Damsyik, Mohd Said Mohd Zainizan, Sahdan Nafarizal, Nayan Anis Suhaili, Bakri Nur Amaliyana, Raship Hashim, Saim Kusnanto Mukti Wibowo Feri Adriyanto zainizan@uthm.edu.my Titanium dioxide Nanomaterial Spin coating Link to publisher's homepage at http://ijneam.unimap.edu.my Trivalent metal-doped TiO2 thin films have been extensively investigated in gas sensor applications. The trivalent metal dopants are Al, Y and Gd. The trilayer fabrication of a gas sensor consists of a thin film, sputtered TiO2 and Au nanoparticles. The characteristics of the gas sensing properties are strongly correlated with the annealing temperature, film thickness, type of doping and deposition method. The subsequent properties are presented – the crystalline structure, grain size, roughness, strain, stress and defects. Thin films have been developed with concentrations of O2 gas up to 10 sccm. A response time for O2 gas in milliseconds was obtained at room temperature. Al doped TiO2 thin film have a faster response time operating at room temperature compared with other thin films. Oxygen vacancy defects also contribute to the speed of the response time for a gas sensor. 2021-12-20T07:05:58Z 2021-12-20T07:05:58Z 2021-07 Article International Journal of Nanoelectronics and Materials, vol.14(3), 2021, pages 269-280 1985-5761 (Printed) 1997-4434 (Online) http://dspace.unimap.edu.my:80/xmlui/handle/123456789/72950 http://ijneam.unimap.edu.my en Universiti Malaysia Perlis (UniMAP) |
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Titanium dioxide Nanomaterial Spin coating |
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Titanium dioxide Nanomaterial Spin coating Nor Damsyik, Mohd Said Mohd Zainizan, Sahdan Nafarizal, Nayan Anis Suhaili, Bakri Nur Amaliyana, Raship Hashim, Saim Kusnanto Mukti Wibowo Feri Adriyanto Rapid response room temperature oxygen sensor based on Trivalent-Elements doped TiO2 thin film |
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Link to publisher's homepage at http://ijneam.unimap.edu.my |
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zainizan@uthm.edu.my |
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zainizan@uthm.edu.my Nor Damsyik, Mohd Said Mohd Zainizan, Sahdan Nafarizal, Nayan Anis Suhaili, Bakri Nur Amaliyana, Raship Hashim, Saim Kusnanto Mukti Wibowo Feri Adriyanto |
format |
Article |
author |
Nor Damsyik, Mohd Said Mohd Zainizan, Sahdan Nafarizal, Nayan Anis Suhaili, Bakri Nur Amaliyana, Raship Hashim, Saim Kusnanto Mukti Wibowo Feri Adriyanto |
author_sort |
Nor Damsyik, Mohd Said |
title |
Rapid response room temperature oxygen sensor based on Trivalent-Elements doped TiO2 thin film |
title_short |
Rapid response room temperature oxygen sensor based on Trivalent-Elements doped TiO2 thin film |
title_full |
Rapid response room temperature oxygen sensor based on Trivalent-Elements doped TiO2 thin film |
title_fullStr |
Rapid response room temperature oxygen sensor based on Trivalent-Elements doped TiO2 thin film |
title_full_unstemmed |
Rapid response room temperature oxygen sensor based on Trivalent-Elements doped TiO2 thin film |
title_sort |
rapid response room temperature oxygen sensor based on trivalent-elements doped tio2 thin film |
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Universiti Malaysia Perlis (UniMAP) |
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2021 |
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http://dspace.unimap.edu.my:80/xmlui/handle/123456789/72950 |
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1724609975254253568 |
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13.214268 |