Rapid response room temperature oxygen sensor based on Trivalent-Elements doped TiO2 thin film

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Main Authors: Nor Damsyik, Mohd Said, Mohd Zainizan, Sahdan, Nafarizal, Nayan, Anis Suhaili, Bakri, Nur Amaliyana, Raship, Hashim, Saim, Kusnanto Mukti Wibowo, Feri Adriyanto
Other Authors: zainizan@uthm.edu.my
Format: Article
Language:English
Published: Universiti Malaysia Perlis (UniMAP) 2021
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Online Access:http://dspace.unimap.edu.my:80/xmlui/handle/123456789/72950
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spelling my.unimap-729502021-12-20T07:05:58Z Rapid response room temperature oxygen sensor based on Trivalent-Elements doped TiO2 thin film Nor Damsyik, Mohd Said Mohd Zainizan, Sahdan Nafarizal, Nayan Anis Suhaili, Bakri Nur Amaliyana, Raship Hashim, Saim Kusnanto Mukti Wibowo Feri Adriyanto zainizan@uthm.edu.my Titanium dioxide Nanomaterial Spin coating Link to publisher's homepage at http://ijneam.unimap.edu.my Trivalent metal-doped TiO2 thin films have been extensively investigated in gas sensor applications. The trivalent metal dopants are Al, Y and Gd. The trilayer fabrication of a gas sensor consists of a thin film, sputtered TiO2 and Au nanoparticles. The characteristics of the gas sensing properties are strongly correlated with the annealing temperature, film thickness, type of doping and deposition method. The subsequent properties are presented – the crystalline structure, grain size, roughness, strain, stress and defects. Thin films have been developed with concentrations of O2 gas up to 10 sccm. A response time for O2 gas in milliseconds was obtained at room temperature. Al doped TiO2 thin film have a faster response time operating at room temperature compared with other thin films. Oxygen vacancy defects also contribute to the speed of the response time for a gas sensor. 2021-12-20T07:05:58Z 2021-12-20T07:05:58Z 2021-07 Article International Journal of Nanoelectronics and Materials, vol.14(3), 2021, pages 269-280 1985-5761 (Printed) 1997-4434 (Online) http://dspace.unimap.edu.my:80/xmlui/handle/123456789/72950 http://ijneam.unimap.edu.my en Universiti Malaysia Perlis (UniMAP)
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Titanium dioxide
Nanomaterial
Spin coating
spellingShingle Titanium dioxide
Nanomaterial
Spin coating
Nor Damsyik, Mohd Said
Mohd Zainizan, Sahdan
Nafarizal, Nayan
Anis Suhaili, Bakri
Nur Amaliyana, Raship
Hashim, Saim
Kusnanto Mukti Wibowo
Feri Adriyanto
Rapid response room temperature oxygen sensor based on Trivalent-Elements doped TiO2 thin film
description Link to publisher's homepage at http://ijneam.unimap.edu.my
author2 zainizan@uthm.edu.my
author_facet zainizan@uthm.edu.my
Nor Damsyik, Mohd Said
Mohd Zainizan, Sahdan
Nafarizal, Nayan
Anis Suhaili, Bakri
Nur Amaliyana, Raship
Hashim, Saim
Kusnanto Mukti Wibowo
Feri Adriyanto
format Article
author Nor Damsyik, Mohd Said
Mohd Zainizan, Sahdan
Nafarizal, Nayan
Anis Suhaili, Bakri
Nur Amaliyana, Raship
Hashim, Saim
Kusnanto Mukti Wibowo
Feri Adriyanto
author_sort Nor Damsyik, Mohd Said
title Rapid response room temperature oxygen sensor based on Trivalent-Elements doped TiO2 thin film
title_short Rapid response room temperature oxygen sensor based on Trivalent-Elements doped TiO2 thin film
title_full Rapid response room temperature oxygen sensor based on Trivalent-Elements doped TiO2 thin film
title_fullStr Rapid response room temperature oxygen sensor based on Trivalent-Elements doped TiO2 thin film
title_full_unstemmed Rapid response room temperature oxygen sensor based on Trivalent-Elements doped TiO2 thin film
title_sort rapid response room temperature oxygen sensor based on trivalent-elements doped tio2 thin film
publisher Universiti Malaysia Perlis (UniMAP)
publishDate 2021
url http://dspace.unimap.edu.my:80/xmlui/handle/123456789/72950
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score 13.214268