Development of In-House MOS transistor at KUKUM Micro Fabrication Cleanroom: Microelectronic undergraduate activities
Organized by Kolej Universiti Kejuruteraan Utara Malaysia (KUKUM), 18th - 19th May 2005 at Putra Palace Hotel, Kangar.
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Kolej Universiti Kejuruteraan Utara Malaysia
2009
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my.unimap-71342009-09-03T03:18:57Z Development of In-House MOS transistor at KUKUM Micro Fabrication Cleanroom: Microelectronic undergraduate activities Marlia, Morsin Nur Hamidah, Abdul Halim Uda, Hashim Hashim, Saim Transistors -- Design and construction MOS transistor Metal oxide semiconductors Module development Undergarduate module Microelectronic engineering Organized by Kolej Universiti Kejuruteraan Utara Malaysia (KUKUM), 18th - 19th May 2005 at Putra Palace Hotel, Kangar. This paper presents the module development of inhouse MOS transistor device at KUKUM Micro Fabrication Cleanroom. The process started with the establishment of process flow, process modules, and process parameters. Four modules were developed and characterized prior to MOS transistor device fabrication namely dry and wet oxidation and etching, resist thickness and exposure dose optimization, n-type and p-type spin on dopant and diffusion also metal thickness characterization. The data were analyzed and applied in the fabrication of MOS transistor devices. Standard CMOS process was utilized in this experiment. The results for all the processes are present in this paper. 2009-09-03T03:18:57Z 2009-09-03T03:18:57Z 2005-05-18 Working Paper p.91-95 http://hdl.handle.net/123456789/7134 en Proceedings of the 1st National Conference on Electronic Design Kolej Universiti Kejuruteraan Utara Malaysia |
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Transistors -- Design and construction MOS transistor Metal oxide semiconductors Module development Undergarduate module Microelectronic engineering |
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Transistors -- Design and construction MOS transistor Metal oxide semiconductors Module development Undergarduate module Microelectronic engineering Marlia, Morsin Nur Hamidah, Abdul Halim Uda, Hashim Hashim, Saim Development of In-House MOS transistor at KUKUM Micro Fabrication Cleanroom: Microelectronic undergraduate activities |
description |
Organized by Kolej Universiti Kejuruteraan Utara Malaysia (KUKUM), 18th - 19th May 2005 at Putra Palace Hotel, Kangar. |
format |
Working Paper |
author |
Marlia, Morsin Nur Hamidah, Abdul Halim Uda, Hashim Hashim, Saim |
author_facet |
Marlia, Morsin Nur Hamidah, Abdul Halim Uda, Hashim Hashim, Saim |
author_sort |
Marlia, Morsin |
title |
Development of In-House MOS transistor at KUKUM Micro Fabrication Cleanroom: Microelectronic undergraduate activities |
title_short |
Development of In-House MOS transistor at KUKUM Micro Fabrication Cleanroom: Microelectronic undergraduate activities |
title_full |
Development of In-House MOS transistor at KUKUM Micro Fabrication Cleanroom: Microelectronic undergraduate activities |
title_fullStr |
Development of In-House MOS transistor at KUKUM Micro Fabrication Cleanroom: Microelectronic undergraduate activities |
title_full_unstemmed |
Development of In-House MOS transistor at KUKUM Micro Fabrication Cleanroom: Microelectronic undergraduate activities |
title_sort |
development of in-house mos transistor at kukum micro fabrication cleanroom: microelectronic undergraduate activities |
publisher |
Kolej Universiti Kejuruteraan Utara Malaysia |
publishDate |
2009 |
url |
http://dspace.unimap.edu.my/xmlui/handle/123456789/7134 |
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1643788689985241088 |
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13.214268 |