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Development of In-House MOS transistor at KUKUM Micro Fabrication Cleanroom: Microelectronic undergraduate activities

Organized by Kolej Universiti Kejuruteraan Utara Malaysia (KUKUM), 18th - 19th May 2005 at Putra Palace Hotel, Kangar.

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Bibliographic Details
Main Authors: Marlia, Morsin, Nur Hamidah, Abdul Halim, Uda, Hashim, Hashim, Saim
Format: Working Paper
Language:English
Published: Kolej Universiti Kejuruteraan Utara Malaysia 2009
Subjects:
Transistors > Design and construction
MOS transistor
Metal oxide semiconductors
Module development
Undergarduate module
Microelectronic engineering
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/7134
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spelling my.unimap-71342009-09-03T03:18:57Z Development of In-House MOS transistor at KUKUM Micro Fabrication Cleanroom: Microelectronic undergraduate activities Marlia, Morsin Nur Hamidah, Abdul Halim Uda, Hashim Hashim, Saim Transistors -- Design and construction MOS transistor Metal oxide semiconductors Module development Undergarduate module Microelectronic engineering Organized by Kolej Universiti Kejuruteraan Utara Malaysia (KUKUM), 18th - 19th May 2005 at Putra Palace Hotel, Kangar. This paper presents the module development of inhouse MOS transistor device at KUKUM Micro Fabrication Cleanroom. The process started with the establishment of process flow, process modules, and process parameters. Four modules were developed and characterized prior to MOS transistor device fabrication namely dry and wet oxidation and etching, resist thickness and exposure dose optimization, n-type and p-type spin on dopant and diffusion also metal thickness characterization. The data were analyzed and applied in the fabrication of MOS transistor devices. Standard CMOS process was utilized in this experiment. The results for all the processes are present in this paper. 2009-09-03T03:18:57Z 2009-09-03T03:18:57Z 2005-05-18 Working Paper p.91-95 http://hdl.handle.net/123456789/7134 en Proceedings of the 1st National Conference on Electronic Design Kolej Universiti Kejuruteraan Utara Malaysia
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Transistors -- Design and construction
MOS transistor
Metal oxide semiconductors
Module development
Undergarduate module
Microelectronic engineering
spellingShingle Transistors -- Design and construction
MOS transistor
Metal oxide semiconductors
Module development
Undergarduate module
Microelectronic engineering
Marlia, Morsin
Nur Hamidah, Abdul Halim
Uda, Hashim
Hashim, Saim
Development of In-House MOS transistor at KUKUM Micro Fabrication Cleanroom: Microelectronic undergraduate activities
description Organized by Kolej Universiti Kejuruteraan Utara Malaysia (KUKUM), 18th - 19th May 2005 at Putra Palace Hotel, Kangar.
format Working Paper
author Marlia, Morsin
Nur Hamidah, Abdul Halim
Uda, Hashim
Hashim, Saim
author_facet Marlia, Morsin
Nur Hamidah, Abdul Halim
Uda, Hashim
Hashim, Saim
author_sort Marlia, Morsin
title Development of In-House MOS transistor at KUKUM Micro Fabrication Cleanroom: Microelectronic undergraduate activities
title_short Development of In-House MOS transistor at KUKUM Micro Fabrication Cleanroom: Microelectronic undergraduate activities
title_full Development of In-House MOS transistor at KUKUM Micro Fabrication Cleanroom: Microelectronic undergraduate activities
title_fullStr Development of In-House MOS transistor at KUKUM Micro Fabrication Cleanroom: Microelectronic undergraduate activities
title_full_unstemmed Development of In-House MOS transistor at KUKUM Micro Fabrication Cleanroom: Microelectronic undergraduate activities
title_sort development of in-house mos transistor at kukum micro fabrication cleanroom: microelectronic undergraduate activities
publisher Kolej Universiti Kejuruteraan Utara Malaysia
publishDate 2009
url http://dspace.unimap.edu.my/xmlui/handle/123456789/7134
_version_ 1643788689985241088
score 13.209306

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