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Wet transfer process for MEMS freestanding PMMA/Graphene membrane development

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Main Authors: Norliana, Yusof, Badariah, Bais, Norhayati, Soin, Burhanuddin, Yeop Majlis
Other Authors: badariah@ukm.edu.my
Format: Article
Language:English
Published: Universiti Malaysia Perlis (UniMAP) 2021
Subjects:
Freestanding PMMA/Graphene
Ferric chloride etchant
PMMA/Graphene transfer
PMMA/Graphene membrane
Online Access:http://dspace.unimap.edu.my:80/xmlui/handle/123456789/69850
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spelling my.unimap-698502021-02-25T01:01:27Z Wet transfer process for MEMS freestanding PMMA/Graphene membrane development Norliana, Yusof Badariah, Bais Norhayati, Soin Burhanuddin, Yeop Majlis badariah@ukm.edu.my Freestanding PMMA/Graphene Ferric chloride etchant PMMA/Graphene transfer PMMA/Graphene membrane Link to publisher's homepage at http://ijneam.unimap.edu.my Process of transferring poly (methyl methacrylate) (PMMA)/Graphene layer to form a freestanding membrane requires a proper method to ensure that the membrane is well suspended with high graphene coverage. This paper demonstrates a method for transferring PMMA/Graphene onto an etched silicon cavity, which forms freely suspended graphene using ferric chloride (FeCl3) solution. The characterisation was performed with an optical microscope and Raman spectroscopy to examine the quality of the transferred PMMA/Graphene membrane. Wet transfer process by FeCl3 etchant was successfully applied to develop a freestanding PMMA/Graphene membrane on a silicon etch cavity. From the study, 0.5M concentration of FeCl3 etchant is more suitable to be applied compared to 1.0 M in order to form a freestanding PMMA / Graphene membrane. 2021-02-25T01:01:27Z 2021-02-25T01:01:27Z 2020-12 Article International Journal of Nanoelectronics and Materials, vol.13(Special Issue), 2020, pages 275-280 1985-5761 (Printed) 1997-4434 (Online) http://dspace.unimap.edu.my:80/xmlui/handle/123456789/69850 en NANOSYM, 2019; Universiti Malaysia Perlis (UniMAP)
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Freestanding PMMA/Graphene
Ferric chloride etchant
PMMA/Graphene transfer
PMMA/Graphene membrane
spellingShingle Freestanding PMMA/Graphene
Ferric chloride etchant
PMMA/Graphene transfer
PMMA/Graphene membrane
Norliana, Yusof
Badariah, Bais
Norhayati, Soin
Burhanuddin, Yeop Majlis
Wet transfer process for MEMS freestanding PMMA/Graphene membrane development
description Link to publisher's homepage at http://ijneam.unimap.edu.my
author2 badariah@ukm.edu.my
author_facet badariah@ukm.edu.my
Norliana, Yusof
Badariah, Bais
Norhayati, Soin
Burhanuddin, Yeop Majlis
format Article
author Norliana, Yusof
Badariah, Bais
Norhayati, Soin
Burhanuddin, Yeop Majlis
author_sort Norliana, Yusof
title Wet transfer process for MEMS freestanding PMMA/Graphene membrane development
title_short Wet transfer process for MEMS freestanding PMMA/Graphene membrane development
title_full Wet transfer process for MEMS freestanding PMMA/Graphene membrane development
title_fullStr Wet transfer process for MEMS freestanding PMMA/Graphene membrane development
title_full_unstemmed Wet transfer process for MEMS freestanding PMMA/Graphene membrane development
title_sort wet transfer process for mems freestanding pmma/graphene membrane development
publisher Universiti Malaysia Perlis (UniMAP)
publishDate 2021
url http://dspace.unimap.edu.my:80/xmlui/handle/123456789/69850
_version_ 1698698671696117760
score 13.209306

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