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Peristaltic micro-pump with normally deflecting membrane fabricated using glass based naster mold

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Main Authors: Ayub, Subandi, Jumril, Yunas, Azrul Azlan, Hamzah, Muhamad Ramdzan, Buyong
Other Authors: jumrilyunas@ukm.edu.my
Format: Article
Language:English
Published: Universiti Malaysia Perlis (UniMAP) 2021
Subjects:
Peristaltic
Master mold
Membrane
Flow rate
SU-8 Photoresists
Online Access:http://dspace.unimap.edu.my:80/xmlui/handle/123456789/69844
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spelling my.unimap-698442021-02-25T00:57:43Z Peristaltic micro-pump with normally deflecting membrane fabricated using glass based naster mold Ayub, Subandi Jumril, Yunas Azrul Azlan, Hamzah Muhamad Ramdzan, Buyong jumrilyunas@ukm.edu.my Peristaltic Master mold Membrane Flow rate SU-8 Photoresists Link to publisher's homepage at http://ijneam.unimap.edu.my In this project, a Peristaltic fluid micro pump having normally deflecting membrane on a glass based master mold is developed. The developed peristaltic micro-pumps consists of three or more pump membranes connected sequentially. This structure is primarily aimed for enabling high pumping stroke of fluid hence increasing the flow rate. Besides the main purpose, this method can simplify the fabrication reducing the steps of the membrane transfer from master mold to membrane spacer. In this study, the flexible membrane that forms a curved dome-shaped is fabricated implementing a glass rod as the master mold with diameter and height of 4 mm and 2 mm, respectively. The membrane layer was made by pouring in PDMS at the top of mold master. This technique enables to produce a membrane in a normally deflecting form even though there is no interference with the membrane. Apart from that, the membrane can be adjusted to obtain expected flow rate and certainly the size of the membrane diameter. The structures have been successfully fabricated using soft-lithography technique. The functionality test of the fabricated pump system shows that the fluid was able to flow from the inlet to the outlet on the other side of the pump membrane without leaking. The result of this research is expected to be applied as fluid injection system in biomedical instrumentation that need high fluid rate. 2021-02-25T00:57:43Z 2021-02-25T00:57:43Z 2020-12 Article International Journal of Nanoelectronics and Materials, vol.13(Special Issue), 2020, pages 59-66 1985-5761 (Printed) 1997-4434 (Online) http://dspace.unimap.edu.my:80/xmlui/handle/123456789/69844 en NANOSYM, 2019; Universiti Malaysia Perlis (UniMAP)
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Peristaltic
Master mold
Membrane
Flow rate
SU-8 Photoresists
spellingShingle Peristaltic
Master mold
Membrane
Flow rate
SU-8 Photoresists
Ayub, Subandi
Jumril, Yunas
Azrul Azlan, Hamzah
Muhamad Ramdzan, Buyong
Peristaltic micro-pump with normally deflecting membrane fabricated using glass based naster mold
description Link to publisher's homepage at http://ijneam.unimap.edu.my
author2 jumrilyunas@ukm.edu.my
author_facet jumrilyunas@ukm.edu.my
Ayub, Subandi
Jumril, Yunas
Azrul Azlan, Hamzah
Muhamad Ramdzan, Buyong
format Article
author Ayub, Subandi
Jumril, Yunas
Azrul Azlan, Hamzah
Muhamad Ramdzan, Buyong
author_sort Ayub, Subandi
title Peristaltic micro-pump with normally deflecting membrane fabricated using glass based naster mold
title_short Peristaltic micro-pump with normally deflecting membrane fabricated using glass based naster mold
title_full Peristaltic micro-pump with normally deflecting membrane fabricated using glass based naster mold
title_fullStr Peristaltic micro-pump with normally deflecting membrane fabricated using glass based naster mold
title_full_unstemmed Peristaltic micro-pump with normally deflecting membrane fabricated using glass based naster mold
title_sort peristaltic micro-pump with normally deflecting membrane fabricated using glass based naster mold
publisher Universiti Malaysia Perlis (UniMAP)
publishDate 2021
url http://dspace.unimap.edu.my:80/xmlui/handle/123456789/69844
_version_ 1698698670813216768
score 13.214268

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