Design and fabrication of uniform aluminium pores for planar microfiltration system

• Main Authors: Kamarul ‘Asyikin, Mustafa, Jumril, Yunas, Azrul Azlan, Hamzah, Burhanuddin, Yeop Majlis
• 其他作者: [e-mail]
• 格式: Article
• 語言: English
• 出版: Universiti Malaysia Perlis (UniMAP) 2021
• 主題: Etching; MEMS; Planar microfiltration system; Silicon; S1813 Photoresist; Uniform pore
• 在線閱讀: http://dspace.unimap.edu.my:80/xmlui/handle/123456789/69691

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