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Design and fabrication of uniform aluminium pores for planar microfiltration system

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Main Authors: Kamarul ‘Asyikin, Mustafa, Jumril, Yunas, Azrul Azlan, Hamzah, Burhanuddin, Yeop Majlis
Other Authors: burhan@ukm.edu.my
Format: Article
Language:English
Published: Universiti Malaysia Perlis (UniMAP) 2021
Subjects:
Etching
MEMS
Planar microfiltration system
Silicon
S1813 Photoresist
Uniform pore
Online Access:http://dspace.unimap.edu.my:80/xmlui/handle/123456789/69691
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spelling my.unimap-696912021-02-11T00:38:14Z Design and fabrication of uniform aluminium pores for planar microfiltration system Kamarul ‘Asyikin, Mustafa Jumril, Yunas Azrul Azlan, Hamzah Burhanuddin, Yeop Majlis burhan@ukm.edu.my Etching MEMS Planar microfiltration system Silicon S1813 Photoresist Uniform pore Link to publisher's homepage at http://ijneam.unimap.edu.my This paper presents a design and fabrication of a fluid filtration system for separating biological molecules through uniform pores in silicon-based planar microfiltration system. The study is aimed to find a simple process for the fabrication of a microfiltration system. The uniform pores are made of aluminium (Al) material deposited on a silicon substrate, whereas the fluid chamber is fabricated using deep reactive ion etching (DRIE) process of the substrate by utilising SF6 as the reaction gas. Afterwards, the prepared filtration membrane is directly bonded with PDMS based microfluidic part using a corona discharge. Tygon S3™ tubings are used as the fluid interconnection between the PDMS sealing layer and the silicon-based Al membrane in order to make up complete silicon-based planar microfiltration system with uniform pores for separating molecules in fluid based on molecule size. The silicon-based planar microfiltration system consists of assembled siliconbased Al membrane, PDMS sealing layer and Tygon tubes. From the initial test conducted, no leaking is detected from the PDMS sealing, and the initial test using DI water shows that the DI water can flow through the uniform filtration pores. The silicon-based planar microfiltration system with uniform pores has the potential to be used in the filtration of biological fluid in separating molecules based on size. 2021-02-11T00:38:14Z 2021-02-11T00:38:14Z 2020-12 Article International Journal of Nanoelectronics and Materials, vol.13(Special Issue), 2020, pages 215-224 1985-5761 (Printed) 1997-4434 (Online) http://dspace.unimap.edu.my:80/xmlui/handle/123456789/69691 en NANOSYM, 2019; Universiti Malaysia Perlis (UniMAP)
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Etching
MEMS
Planar microfiltration system
Silicon
S1813 Photoresist
Uniform pore
spellingShingle Etching
MEMS
Planar microfiltration system
Silicon
S1813 Photoresist
Uniform pore
Kamarul ‘Asyikin, Mustafa
Jumril, Yunas
Azrul Azlan, Hamzah
Burhanuddin, Yeop Majlis
Design and fabrication of uniform aluminium pores for planar microfiltration system
description Link to publisher's homepage at http://ijneam.unimap.edu.my
author2 burhan@ukm.edu.my
author_facet burhan@ukm.edu.my
Kamarul ‘Asyikin, Mustafa
Jumril, Yunas
Azrul Azlan, Hamzah
Burhanuddin, Yeop Majlis
format Article
author Kamarul ‘Asyikin, Mustafa
Jumril, Yunas
Azrul Azlan, Hamzah
Burhanuddin, Yeop Majlis
author_sort Kamarul ‘Asyikin, Mustafa
title Design and fabrication of uniform aluminium pores for planar microfiltration system
title_short Design and fabrication of uniform aluminium pores for planar microfiltration system
title_full Design and fabrication of uniform aluminium pores for planar microfiltration system
title_fullStr Design and fabrication of uniform aluminium pores for planar microfiltration system
title_full_unstemmed Design and fabrication of uniform aluminium pores for planar microfiltration system
title_sort design and fabrication of uniform aluminium pores for planar microfiltration system
publisher Universiti Malaysia Perlis (UniMAP)
publishDate 2021
url http://dspace.unimap.edu.my:80/xmlui/handle/123456789/69691
_version_ 1698698640324820992
score 13.214268

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