Normah, A. (2009). Effect of alignment mark architecture on alignment signal behavior in advanced lithography. Universiti Malaya.
シカゴスタイル引用形Normah, Ahmad. Effect of Alignment Mark Architecture On Alignment Signal Behavior in Advanced Lithography. Universiti Malaya, 2009.
MLA引用形式Normah, Ahmad. Effect of Alignment Mark Architecture On Alignment Signal Behavior in Advanced Lithography. Universiti Malaya, 2009.
警告: この引用は必ずしも正確ではありません.