APA Citation

Normah, A. (2009). Effect of alignment mark architecture on alignment signal behavior in advanced lithography. Universiti Malaya.

Chicago Style Citation

Normah, Ahmad. Effect of Alignment Mark Architecture On Alignment Signal Behavior in Advanced Lithography. Universiti Malaya, 2009.

MLA Citation

Normah, Ahmad. Effect of Alignment Mark Architecture On Alignment Signal Behavior in Advanced Lithography. Universiti Malaya, 2009.

Warning: These citations may not always be 100% accurate.