Nano patterning of cone dots and nano constrictions of negative e-beam resist for single electron transistor fabrication

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Main Authors: Sutikno, Madnasri, Uda, Hashim, Zul Azhar, Zahid Jamal
格式: Article
语言:English
出版: Springer New York 2009
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在线阅读:http://dspace.unimap.edu.my/xmlui/handle/123456789/6694
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