Nano patterning of cone dots and nano constrictions of negative e-beam resist for single electron transistor fabrication

• Main Authors: Sutikno, Madnasri, Uda, Hashim, Zul Azhar, Zahid Jamal
• 格式: Article
• 語言: English
• 出版: Springer New York 2009
• 主題: Transistors; Integrated circuits > Design and construction; e-beam; Lithography, Electron beam; Integrated circuits; Electron beams; Lithography
• 在線閱讀: http://dspace.unimap.edu.my/xmlui/handle/123456789/6694

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