Fabrication of a cost-effective MEMS-based piezoresistive cantilever sensor for gait movement analysis

• Main Authors: Ahmad Fitri Anuar, Mahayudin, Salem, Saadon, Yufridin, Wahab, Fazmir, Hamzah, Muhammad Zulhilmi, Zainol, Shazlina, Johari, Mazlee, Mazalan
• Other Authors: [e-mail]
• Format: Article
• Language: English
• Published: Kementerian Pendidikan Tinggi (KPT), Malaysia 2018
• Subjects: MEMS; Accelerometer; Micro cantilever; Piezoresistor; Polysilicon; Silicon; KrF laser; Micromachining; Gait analysis
• Online Access: http://dspace.unimap.edu.my:80/xmlui/handle/123456789/52058

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